Vacuum Unit

Length symbol Tension bolt assembly (2 pcs. per set) [L = 12.5 x M + 10.5] M: Length symbol 1 to 40 to 1 L = 23 40 L = 510.5 Exploded View e ZK2 TB1 A 05 to Applicable stations L 01 For 1 station manifold 1.25 P = 12.5 5.25 7.5 10 For 10 stations manifold 35 25 Port plug assembly Port plug assembly Exploded View t Exploded View r 5.5 (Purchasing order is available in units of 1 piece

90

5 Length symbols Applicable stations [L = 12.5 x + 10.5] : Length symbols 1 to 40 01 1 L = 23 to 40 L = 510.5 For 1 station manifold to 10 For 10 stations manifold L rPort plug assembly VVQZ2000 CP tPort plug assembly 1.25 P=12.5 5.25 7.5 ZK2 MP1C6 A 35 25 5.5 yOne-touch fitting assembly VVQ1000 51A C8 L Dimension L = 12.5 x n + 10.5 No.

VZ5000

length) G: 300 mm H: 600 mm VZ5440 VK VZ Manual override (Non-locking) (Mounting hole) VF VFR VZ5540 VP4 VZS VFS VS4 VQ7 (PE port) EVS 2-Rc 1/4 (3(R1), 5(R2) port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFN L plug connector (L) VZ5 40-LM plug connector (M) VZ5 40-M01 02 3 4 5 01 02 3 4 5 (Lead wire length) 300 (Lead wire length) 300 DIN terminal (D) VZ5 40-D01 02 3 4 5 : With light/surge

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Example: SS5YJ7-20-03 1 pc. (Manifold base) SYJ7120-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series VS

4.0V 3 3 1 1 4 2 2 12 12 12 12 MINI CONNECTOR MINI CONNECTOR MINI CONNECTOR MINI CONNECTOR VLV PWR IN VLV PWR IN BUS IN BUS IN 5PIN(MALE) 5PIN(MALE) 4PIN(MALE) 4PIN(MALE) 1.DRAIN 1.DRAIN 4.CAN H 4.CAN H 5.CAN L 5.CAN L 2.V+ 2.V+ 3.V3.VG 12 12 N N SMC SMC O O MINI 4 PIN CONNECTOR (SOLENOID POWER) P SIDE U SIDE D n 3 STATION 2 1 4 NOTES: 1) SIZE 1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Manifold Specifications

Prefix it to the part nos. of the solenoid valve, etc. 3-3-60 5 Port Solenoid Valve Body Ported Series VZ5000 Common SUP/Common EXH Type 20 How to Order Stations VV5Z5 05 20 1 4(A), 2(B) port P, R port thread type 02 2 stations 1(P) port NPT G Nil Rc Rc 1/8 Applicable solenoid valve 15 15 stations 00F Rc 1/8 3/5(R) port VK 00N G L M D 01 C6 C8 NPTF 00T VZ52VZ Note) For more than 6 stations

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

ZL3-OM00801

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa

VT317

type Max. number of stations Applicable solenoid valve B mount 20 stations (1) VO317(3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port

ITV_P-E

Power cable 1 Brown Power supply Vcc 2 White NC 3 Blue GND 4 Black Monitor output Signal cable 1 Brown Input signal 1 2 White Input signal 2 3 Blue Input signal 3 4 Black Input signal 4 5 Gray Common Common is no polarity.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/CLIPS, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02565 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, STACKING, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02700 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02081 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SUB-PLATE, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), 1.54323 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SUB-PLATE, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .07348 lb