VZ1000 Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted
No.ZL3-OM00601-B 1.How to Order ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 Without valve ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 With valve Pressure switch ZL3 M 06 1 K1 5 LO Z 1 V A M W 1 with energy saving function 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 1) Max. suction flow 2) Standard supply pressure 4) Exhaust specifications 3 300L/min(ANR) M 0.35MPa Nil Exhaust through silencer H 0.50MPa
ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.
type Max. number of stations Applicable solenoid valve B mount 20 stations (1) VO317(3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port
2 Series IR3000 Connection Rc(PT) 1/8 01 Connection Rc(PT) 1/4 02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G
L 100mm, or stroke 1 2 Grease on the outer circumference Grease in the groove Rod seal part Approx. 3g A little less than 1cm Amount of grease Fig. 8 Position for application of grease Table 8 Amount of grease units: g Stroke 20 25 32 40 P o s i t i o n f o r Bore size g r e a s e At 100st 2 3 3 3 to 4 ( 1 ) , ( 2 ) , ( 3 ) , ( 4 ) , ( 5 ) , ( 6 ) 50st added 0.5 0.5 0.5 1 ( 5 ) , ( 6 )
SY100-30-A A X T6 61 -12 A *x2 23 - No.ZQ-OM01401-B 2 () ZQ-ZSEA M G K-2-A (1) (2) (3)(4) (5) (1) [kPa] EA NPN2 EB PNP2 0 to -100 EC NPN1 + EE PNP1 + FA NPN2 FB PNP2 FC NPN1 + -100 to 100 FE PNP1 + 1) NPN1 + VA 1) PNP1 + VB 1 2) 2) M SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 (
(October 1999) K2 Supply valve (N.O.), Release valve (N.C) (7) Lead wire specifications J1 Note 1) Supply valve (N.C.) Nil No lead wire with connector J2 Note 1) Supply valve (N.O.) G Lead wire with connector Note 1) This product does not allow the adsorbing part to be released to the air at vacuum stop.
Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch
Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted
Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2
Effective area (mm) Weight g A
Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.
Effective area (mm) Weight g A
digit Hysteresis mode Hys teresis 0 to variable 1 Window comparator mode Output voltage (rated pressure range) 1 to 5 V 2.5%F.S. 0.6 to 5 V Analogue Voltage output 2.5%F.S. output Linearity 1%F.S.
9@0@1@2 MHW-A2001 MHW-A2501 MHW-A3201 MHW-A4001 MHW-A5001 wtio!1@2 Dyu!3!4!5 MHW2-D MHW-A2002 MHW-A2502 MHW-A3202 MHW-A4002 MHW-A5002 Finger assembly MHW2-D1 MHW-A2002-1 MHW-A2502-1 MHW-A3202-1 MHW-A4002-1 MHW-A5002-1 Please order 1 piece finger assembly per one unit.
This should conclude the calibration. g Confirm calibration setting by removing the gap gauge from the nozzle. The LED Green 1 should go off.
Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)
Series: 250 [3 Port COM (Single Unit)], Voltage: 2 (200VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)
Series: 250 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)