Table of Contents 1) ISA2 Accumulated pulse flow rate exchange value (Pluse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse IS l/min, CFM x 102 l/min, CFM x 101 Note 2, 3) Real-time flow rate Display unit l, ft3 x 101 Accumulated flow ZSM Accumulated flow range 0 to 9 l Linearity Note 4) 5% F .S. or less PF2 Repeatability Note 4) 1% F .S. or less IF 1% F .S. or less (15 to 35C
Port size F.R.L. body center E F F E E B C E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable models AC10, AC10A, AC10B Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 A 23 B 16 D 25 Cross interface AC20, AC20A, AC20B AC20C, AC20D AC25, AC25B, AC25C AC30, AC30A, AC30B AC30C, AC30D AC40, AC40A, AC40B AC40C, AC40D 22 40 40 40 28
Exhaust) 1 Plug in unit T Y P E O F M A N I F O L D N U M B E R O F S TAT I O N S 01 1 Station 16 16 Stations N o t e 1 ) When more than one option is desired Combined symbols in alphabetical order.
Rc F (2) Nil N (1) NPT Body size 01 NPT 1/8 Port size G Symbol F (2) G 40 30 02 1/4 Note 1) Drain guide is NPT 1/4 (applicable to AW30 to 40) Note 2) Drain guide is G 1/4 (applicable to AW30 to 40).
0 0 5 1 W1 01 SY Side/Bottom ported 3 1 3 0 5 1 W1 M5 01 SY Top ported q w r e t y u i o !
/ indicator light T NPTF F G S L N NPT Z Refer to Table 1 below for applicability.
MPa ASF Standard size 1 4 1 2 1 2 4 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Thread type Nil N F Rc NPT G AK4000-03/-04 AK6000-06/-10 Port size 0.5 MPa 0.5 MPa Port size Applicable series AK2000 AK2000/4000 AK4000 AK4000 AK6000 AK6000 Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa 0.3 MPa 0.3 MPa 0.7 MPa 0.7 MPa 01 02 03 04 06 10 1 8 1 4 3 8 1 2 3 4 1 Flow rate (l/min (ANR)) Flow
Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.
2 1 L L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.
9 7 to 0 L Pushing *3) 1mm/s speed F to 8 H 7 to 0 L Moving 10 *3) 1% force F to 8 H 11 F to 0 L Stroke (-) to Area 1 0.01mm Stroke (+) of the 12 F to 0 H basic parameter 13 F to 0 L Stroke (-) to Area 2 0.01mm Stroke (+) of the 14 F to 0 H basic parameter 7 to 0 L In position 15 *3) 0.01mm *4) F to 8 H H=Most Significant Byte or upper word L=Least Significant Byte or lower word *3) The
2 to 15 Plug-in type VV5FR2-01 VK VFR200-F 2 to 8 VFR210-G VFR210-E VFR210-T VFR210-D VFR210-L VFR210-M Note) Side/Bottom 1 4 VZ 1 4 1 8 C6, C8 , Non plug-in type VV5FR2-10 2 to 15 VF VFR Note) Side ported and bottom ported cannot be taken at the same time.
Cross spacer E F F E E B C A E D E: 4 Rc F: Without thread Model Note) Applicable model Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 D C B A Y24-01-A Y24-02-A Y34-01-A Y34-02-A Y44-02-A Y44-03-A Y54-03-A Y54-04-A AC20-A 40 22 40 40 48 AC25-A, AC30-A 28 43 49 54 AC40-A 36 48 60 Caution on Mounting 62 AC40-06-A 40 62 72 1.
Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2) Pressure gauge AWM30/40 AWD30/40 (with color zone) 0.02 to 0.2 MPa setting
(Except L kit) F, P and S kits are provided with an exhaust on one side, while L kits are with an exhaust on both sides. Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)
O F 34 10 one-touch fitting Combination of D: With auto drain (N.O.) and H: For medium air pressure D I L T (Accessory) Bracket N K J M U V E B IN OUT 20 1/4 female threaded C Option H A J: Drain guide 1/4 female threaded Drain G M5 Maintenance space 20 1/4 female threaded (mm) A Model Port size Bracket related dimensions B C D E F G H 173 I 56 J 20 K 5 T 6 U 6 L 12 M 6 V 10 N 35 O 54 P 70
K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44
Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6
PS Applicable stations (For F, P, J, S kit) 01 Station 1 PW 24 Station 24 Construction L kit: Lead wire kit Lead wire length 0.6 m L kit: Lead wire kit Lead wire length 1.5 m L kit: Lead wire kit Lead wire length 3 m Note 1) F0: Nil Note 2) Specify from 01 to 16 for S kit.
T F N Table q Port/Orifice Size Table w Voltage-Electrical Entry-Options Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z Orifice size 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) Solenoid C D, T G, C S(1) T VX31 VX32 VX33 01( ) 02( ) 02( ) 03( ) 02( ) 1 8 1 4 1 4 3 8 1 4 AC 03( ) 3 8 Ordering Example (
Parts D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting F With bracket N Name plate Note) When two or more symbols are specified, indicate them alphabetically.