C85

1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 q o !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

KQ2

(inch) Model H Connection thread Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 KQ2H07-M5 Note) Mass (g) (Width across flats) L A M D Applicable tubing R M KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 7 16.7 21.1 13.6 18 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.7 10.3 24 21.1 20.5 18.4 21.6 22.5 20.5 18 15 15.3 18.5 17 8 11 14 11 16.5 1 8

Electric Actuator

1 6N S q w e r t y u i o !

F

) C O N N E C T I O N T H R E A D M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 00 Same dia. tube 99 Stem fitting P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T U B E O.D. 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm KCH S T R A I G H T P L U G KCH F O R F R E Q U E N T U S E Courtesy of Steven Engineering, Inc. !

Base Mounted Metal Seal/Rubber Seal Series VQ

C3, C4, C6, M5 C6 T1 U side D side Stations 3 2 1 Terminal no.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

CRBU

59 -0.005 -0.014 -0.00 -0.043 47.5 50 13 22 17.5 M5 X 0.8 M5 X 0.8 8 5.5 12 M5 X 0.8 1 29 2 43 4.5 42 52 69 8 16 1.2-11 Series CDRBU Auto Switch Specifications Refer to p.2.11-1 for further information on auto switch single body.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

•

1 :M6x 1 Y Rat type Flat with rib Deaptype Bellows type ,~ G H G H Rat Ratwith rib M5 M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Battery-less

1 !2 u r q !7 y Component Parts No.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

One-touch Fittings

Q D M L 1: D is maximum diameter.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Note) For bracket assembly part no., refer to page 934. 10 2 x 3.2 (For mounting) 2.6 (Reverse-mountingprevention hole) (CE-compliant models only) VQZ1 2 -G1-M5 1 8 9 0 1 1.8 19.8 M5 x 0.8 [1(P), 5(R1), 3(R2) port] (PE port) 12 M5 x 0.8 [4(A), 2(B) port] 3 5 0.8 10 1 25.7 2 x 2.2 die-cast hole (For manifold gasket positioning) L-type plug connector (L): VQZ1 2 -L1-C3, C4, C6 0 1 1 8 9 M-type