2

26 AW20(K)-B 1/8, 1/4 1/8 40 87.6 72.4 26 M28 x 1 40 26 5 28 27 27.8 37.5 37.5 62.5 37.5 63.5 AW30(K)-B 1/4, 3/8 1/8 53 115.1 85.6 29.4 30 M38 x 1.5 55 29.4 3.5 28 30 27.8 40.9 37.5 66.9 37.5 67.9 AW40(K)-B 1/4, 3/8, 1/2 1/8 70 147.1 91.7 37.3 38.4 M42 x 1.5 80 37.3 1.5 28 38.4 27.8 48.8 42.5 75.7 42.5 75.7 AW40(K)-06-B 3/4 1/8 75 149.1 93.2 37.3 38.4 M42 x 1.5 80 37.3 1.2 28 38.4 27.8

V100

PVT317-53-1A 1 pc.

SX

pins flat cable) Connector block assembly (For 20 pins flat cable) Connector block assembly (For 10 pins flat cable) Connector block assembly (For 2 to 8 stations (T, T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

port M5 x 0.8 GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For AC 10-SYJ3123-1LO-M3 SY100-30-1A-20 Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33mm 2 Max. cover diameter: 1.7 mm Hook Insulation 3.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

smcmaintenancepartslist

121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

V

SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF 1/8 SY5000 SY5000-39-1TA NPTF 1/8 SY7000 SY7000-38-1A PT 1/4 SY7000 SY7000-39-1A PT 1/4 SY7000 SY7000-38-1TA NPTF 1/4 SY7000 SY7000-39-1TA NPTF 1/4 FLAT RIBBON CABLE ASSEMBLY AXT100-FC26(1/2/3) PORT PLUGS Cable Length (L) Assembly Number Note 1.5m AXT100-FC26-1 Cable 26 CoreX28AWG 3m AXT100-FC26-2 Cable 26 CoreX28AWG

SYJ3000/5000/7000

(Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56 62 DO 64 70 DC 56 62 EO 24 28 EC 16 20 CA 8 9 CB 16 17 FY 20.5 23.5 FZ 5 6 +0.025 0 +0.025 0 Model MHS2-32D MHS2-40D UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2

SZ3000

Supply/exhaust block assembly (6): SZ3000-50-1A-C6 External pilot block assembly (6): SZ3000-54-1A-C6 External pilot block assembly (4): SZ3000-54-1A-C4 [Note] SUP blocking disk: SZ3000-114-4A EXH blocking disk: SZ3000-114-4A (2pcs.

Table of Contents

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S D20YB effective depth YC YA 2 View With internal shock absorber MSQAR MSQBR High precision type MSQAA: With adjustment bolt MSQAR: With internal shock absorber DJ DH DI FE HA (UV) (mm) (mm) FU DH DI DJ DK DL FE HA UV Size 10 20 30 50 Size 10 20 30 50 31.5 45h8 46h8 20H8 5 15H8 10 18.5 52.5 34.7 60h8 61h8 28H8 9 17H8 15.5 26 63 (Max. approx.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM