15 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5.1 NM2 M4 x 12 2.5 10 12 Hexagon socket head cap screw/set screw Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 (for hub fixing)* 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 * For screw sizes, refer to the hub
0.9 MPa VG342 Model 3 position valve Series VEX3 Piping specifications Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22
set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption
30 51.5 51 9 6 40 32 24 16 23 21 20.5 7.5 21 14 16.5 9 56 35 51.5 54.5 11 8 LT LX LY LZ MM N NA NE NF NN S WH X Y ZZ P LS Bore size (mm) M8 x 1.25 M22 x 1.5 20 232 22 26 33.5 13 192 20 9 265 6.5 40 41 55 1/4 M10 x 1.25 M24 x 1.5 25 233 27 32 37 17 193 5.8 to 8.8 20 9 270 6.5 40 46.5 55 1/4 M10 x 1.25 M30 x 1.5 32 241 27 38 43.5 17 195 23 9 278 7 45 53 60 3/8 M14 x 1.5 M33 x 2.0 40 251.5
53 27 70 12 8 46 6 8 32 5.5 13 28 32 31 f8 Up to 800 21 M14 x 1.5 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 13 36 40 34 f8 Up to 800 21 M16 x 1.5 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 19 44 (mm) Bore size (mm) NB NC NN P S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 19 15 M30 x 1.5 1/8 87 159 40 M33 x 2 24 21 1/4 108 183 Single clevis type: CHMC
11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are
9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 Diaphragm Body 1 1 Chromate treatment Spring Valve guide 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm shell 1 1 Zinc chromate treatment Chromate treatment Washer Valve 1 1 Rubber lining material: HNBR Spring holder Valve spring 1 1 Zinc chromate treatment Seal Diaphragm 1 1 O-ring holder Diaphragm holder
(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D
) 94 (102) 100.5 R 34 (39.5) 45 (53) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.
.67 RESET 87 STOP 9 53 97 NO.6 No.6 (3) NO.7 No.7 No.7 (1) NO.7 No.8 NO.8 (4) No.9 NO.9 (2) (1) 6 7 9 7 (2) 8 9 7 (3) 8 7 5 3 (4) 7 9 9 7 *1 PLC I/O 1No.7 (3)No.7 (1)NO.7 (3)NO.7 [1] OUT23 ONIN02 STOP 2 (4) (2) (4) RESET No.8 No.9 ON7 (1) NO.8 NO.9 RESET STOP OFF ON IN0 [2] BUSY ONOUT01 bit_0 OFF IN1 ON OFF [3] BUSY ON IN2 OFF [4] RESET [5] BUSY OFF [6] BUSY OFFRESET
1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?
8 @1 u !3 q !5 !1 10A e !2 t !9 !7 !4 !6 !0 i 2A @2 r @0 o y !8 @1 u !
(same side) n = 2, 4, 6, 8 n = 4, 8,1 2, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 100 1 pc. 100 110 120 1 or 2 pcs. 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (different sides/same side) (n 4) 2 140 + 55 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 120 + 55 130 + 55 "n" pcs.
8 @1 u !3 q !5 !1 10A e !2 t !9 !7 !4 !6 !0 i 2A @2 r @0 o y !8 @1 u !
Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.
1 @6 @7 o @4 !5 !0 !6 @0 B A !9 !8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.
W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 9 100 9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.
22 26 32.5 38 46.5 56.5 72 89 22 22 24.5 26 31 31 38.5 45 7 7 7 10 10 10 12 14.5 6.6 6.6 7 9 9 9 12 14 27 29 33.5 38 45 50 63 74 4 4 4 4 5 5 6 6 2.8 2.8 5 5 6 6 8 8 22 26 32 36 45 50 63 75 36 40 46 52 64 74 96 116 8 8 10 10 12 12 16 16 22 26 32.5 38 46.5 56.5 72 89 8 10 15 17.5 20 22.5 38 38 50 55 70 80 100 120 16 16 16 18 21 21 26 27 7 7 7 9 9 9 11 13 55 60 64 72 90 100 126 150 M5 M5
4 8 6 10 LG 8 4 LG MRR MRR or (Note) Signal layout 1 5 9 1 3 5 7 9 3 7 P5 P5 MR 9 SHD MR 7 8 LE-CSE-SB View seen from wiring side.
Series ZP2 CAT.ES100-76A Vacuum Pad Series ZP2/ZP Vacuum Pad Series ZP2/ZP Pad Diameter List : Series ZP2 : Series ZP Page of ZP2 Pad type Symbol 14 0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13 Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT