F

21 15 16 5.6 5.6 16 5/32 1/16 KQH03-33S 11.11 22 18 16 3 7 6 M5x0.8 KQH06-M5 11.8 24 20.5 17 4 4 9 5/32 1/8 KQH03-34S 11.11 22 18 16 3 9 6 1/8 KQH06-01S 12 22.5 18.5 17 13.1 13.1 10 5/32 1/4 KQH03-35S 14.29 21 15 16 3 16 6 1/4 KQH06-02S 14 23 17 17 13.1 13.1 15 3/16 1/8 KQH05-34S 12.7 22 18 16 3.5 11 6 3/8 KQH06-03S 17 23 16.5 17 13.1 13.1 27 3/16 1/4 KQH05-35S 14.29 21 15 16 3.5 12 8 1/8

High Power Cylinder Series RHC

] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum speed Vmax

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY R 1 3 Allowable moment Series CY B 1 3 Series Variations Guide type Series Page 1 3 Basic type CY B 8-15-6/8-15-24 1 3 Direct mount type CY R 8-15-16/8-15-32 Slider type (Slide bearing) CY1S 8-15-46 Slider type (Ball bushing bearing) CY1L 8-15-58 High precision guide type (Single axis) CY1H 8-15-68 High precision guide type (Double axes) CY1HT 8-15-68 8-15-1 2 Magnetically coupled

CG1

8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400 25 25 19.5 27 32 32 37 37 10 (12) 40 71 (79) 113 (121) 15 (16) 5.5 6 7 7 10 10 M5 X 0.8 Depth 8 35.5 44 55 69 80 10 (11

KR

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series. Caution Grounded 1.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

0 5 10 15 Transfer load m (kg) Refer to page 145 for deflection data. 74 Non-standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF(X10) Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side 8H8 depth 8 Body mounting reference plane 130 200 Z section detail Stroke + 150

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) D-A9, A9V 50 8 9.5 8 D-A9/A9V Reed switch 1 or 2 pcs. (different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs.

2/3 Port Valve

210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM Width across flats B1 H2 GA1 Cushion

CG5-S

32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130 100 22 60 to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion

MTS

0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

MGP

8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A DB E Bore size (mm) Bore size (mm) X XA XB XC

CY1

16 25 26 L 66 70 80 92 110 122 N 15 15 17 21 25 25 NA 24 30 36 46 55 69 NB 13 13 15 19 23 23 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2.0 F 13 13 16 16 2 2 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Port size Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)1/4 0.007 0.037 0.007 0.043 Q x R M8 x 1.25 x 16 M10 x 1.5 x 16 TC x R M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 S 106 111 124

CJ5-S

50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100

CJ5-S

50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131

REA/REB

27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z

REA/REB

M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3. Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.