CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

ZP

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 8 12 8 57.5 80 38 13 15.5 18 4 6 3.5 55 8 8 73.5 13 20 Up to 300 20 26 10 12 8 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 25 26 12 20 10 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 32 32 14 20 10 76 100.5 52 22 21 24 8 11 4 70 8 11 90.5 16 Up to 300 40 H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 M20 x 1.5

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 12 16 20 25 8 8 8 9.5 6.8 6.8 6.9 8.1 #8-32UNC #8-32-UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke

CQM

W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

4/5 Port Solenoid Valve

Station 12 Station 4 Station 3 Station 2 Station 1 { { { { { 22 33.9 Triangle mark 1 2 3 (Max. 12 stations) 24 25 26 Reference figure Note) Terminal no. is not indicated on the connector.

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

JA/JAH/JB/JS

28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 8 9 9 13 13 13 15 15 18 24 24 24 42 J D-X 20Data For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-5 6

JA/JAH/JB/JS

32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 8 9 9 13

CV/MVGQ

12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) RE A B 100 110 120 15 90 1 REC 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL (n 2) 2 25 + 55 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 140 + 55 n = 4, 8, 12, 16 CX n (Same side) 15 75 90 90 100 100 110 110 Different

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8,1 2, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 100 1 pc. 100 110 120 1 or 2 pcs. 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (different sides/same side) (n 4) 2 140 + 55 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 120 + 55 130 + 55 "n" pcs.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OPTIONS AND PERIPHERAL EQUIPMENT (b) Surge protector RSPD-250-U4 [Unit: mm] 1 2 3 5.5 1 11 1 4.2 0.5 Resin 28.5 1 28 1 Lead +30 0 200 1 3 2 4.5 0.5 Case 41 1 11 35 12. ABSOLUTE POSITION DETECTION SYSTEM 12.

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

C95

G1 K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6

CM2

M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

LJ1H

screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options

5-Port Solenoid Valve

2(B) port] Applicable tubing O.D.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12 (Station 1) (Station n) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12, 1/2" 4.5 2 56.6 P 1 B 2 P 1 82.7 B 2 B 2 B 2 B 2 (61.1) 4 A 3/5 E 3/5 E 11.1 8.7 35.2 31.6 4 A 4 A 4 A 4 A 23 14.2 (For DIN rail mounting) 55 20.5 (Pitch) P = 19 (21.7) (10) (14.3) *1 Refer to page 159 for dimensions of the external