CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 125 25 135 150 25 + 55 (n2) 2 125 + 55 (n4) 2 135 + 55 (n4) 2 150 + 55 (n4) 2 n pcs. (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 145 35 155 170 D-F5NTL 35 + 55 (n2) 2 (n = 4, 8, 12, 16) 145 + 55 (n4) 2 155 + 55 (n4) 2 170 + 55 (n4) 2 n pcs.

ZP

32 40, 50 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, Rc M5 x 0.8, M6 x 1, M8 x 1.25, Rc M6 x 1, M8 x 1.25, Rc 1 8 1 8 Mounting Use connection for vacuum entry Pad Type Flat with ribs Deep Bellows Pad form Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13

Basic type / Direct mount type Series CY3B/CY3R

111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 A 4 4 4 8 8 8 10 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 M 30 NA x M5 x 0.8 thread depth 6.5 KA 21 5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 12 16 20 25 8 8 8 9.5 6.8 6.8 6.9 8.1 #8-32UNC #8-32-UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke

CV/MVGQ

For detailed specifications, refer to page 10-20-1.

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

4/5 Port Solenoid Valve

SYJ3223 5 port body ported 0.9 M3 x 0.5 M3 x 0.5 10-SYJ3323 3 position 58 56 66 10-SYJ3423 10-SYJ3523 37 55 36 53 41 63 10-SYJ3133 2 position 4 port base mounted (For manifold base only)Note 1) 10-SYJ3233 1/8 10-SYJ3 M5 x 0.8 3 position 58 56 66 10-SYJ3433 10-SYJ3533 Note 1) Dedicated for manifold base, refer to page 11 for details.

MGG

Other Warning 1. Consult SMC concerning water resistance, flexibility of lead wires and usage at welding sites, etc. 55 Series MGG Specific Product Precautions 1 Be sure to read before handling. Refer to pages 49 through 55 for safety instructions, actuator precautions and auto switch precautions. Mounting and Adjustment Warning Caution 1.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse

CJ2

sides) 2 (Same side) 2 (Different sides) 1 Auto switch mounting style No. of auto switches mounted D-A7 D-A80 D-A73C D-A80C NCM 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 NCA D-A7H D-A80H Band mounting style (6, 10, 16) DD-H7 D-H7W D-H7BAL D-H7NF Rail mounting style (10, 16)

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

or 2 pcs. 10 100 100 110 120 (different sides/same side) D-A5, D-A6 D-F5, D-J5 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 100 + 55 110 + 55 120 + 55 10 + 55 100 + 55 "n" pcs.

C95

12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA Singlephase Singleturn 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg