CV/MVGQ

, 16 D-A59W n (Same side) 90 100 110 120 15 1 2 (Different sides, Same side), 1 25 110 120 130 140 D-F5NTL n = 2, 4, 6, 8 25 + 55 (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 140 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G59F D-G5NTL Same side

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFY04-01 KFY04-02 KFY06-01 KFY06-02 KFY06-03 KFY08U-01 KFY08U-02 KFY08U-03 KFY08N-01 KFY08N-02 KFY08N-03 KFY10U-02 KFY10U-03 KFY10U-04 KFY10N-02 KFY10N-03 KFY10N-04 KFY12U-02 KFY12U-03 KFY12U-04 KFY12N-02 KFY12N-03 KFY12N-04 28 32 31 37 51 48 50 55 47 48 53 58 63 89 57 62 88 79 79 93 76 78 92

Free Mount Cylinder

31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

KQ2

48.6 15 16 8 9.8 13.4 9.8 13.4 15.4 10.4 4 2.9 2.9 1 8 M5 x 0.8 22.5 15 22.5 25 24.5 25.5 30 29.5 30 32 33.5 40.5 41.5 D1 3.8 3.8 L3 L2 8 6 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 12.8 17 5.9 7.5 Applicable tubing 10 D2 M5 x 0.8 17.6 28.5 11.2 16 12 K 15.2 8 18.5 20.6 27.5 14.3 20.5 14 M 31 20.6 21 20.3 27 18.5 10 14 H 34 25.2 12 17 20.9 22 30.8 39 1 2 3 8 1 2 (55) (65) 55 78 21 16 25 39

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

AC

8 1/4 1/4 3/8 1/4 3/8 3/4 1 1/4 3/8 1/2 1/8 1/8 1/4 1/4 1/4 1/4 1/4 3/4 1 1 M5 X 0.8 Port size 1/8 1/16 Gauge port size Fluid Air 1.5 MPa 1.0 MP Proof pressure Max. operating pressure 0.05 to 0.85 MPa 0.05 to 0.7 MPa Set pressure range 90 (M5 X 0.8) 500(1/4) 1500(3/8) 2000(3/8) 4000(1/2) 4500(3/4) 5000(3/4) 6000(1) 6000(1) Flow (l/min(ANR))(Port size)(1) Ambient and fluid temperature 5 to

Compact 5-Port Solenoid Valve

7 6 5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no

Series 10-SV ® EX500 Decentralized Serial Wiring

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 20 73.5 8 13 8 4 55 3.5 6 26 38 13 80 Up to 300 18 15.5 57.5 8 25 26 83.5 13 9 8 7 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 10 26 32 13 83.5 9 8 7 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 12 32 16 90.5 8 11 8 70 4 40 11 41 52 22 100.5 Up to 300 24 21 76 14 H GR H1 K PG P N NA PH PL PW S TD TT TY TX TZ Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 127 38 10

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

A2W One-touch fitting for 10 One-touch fitting for 3/8" One-touch fitting for 3/8" One-touch fitting for 8 One-touch fitting for 5/16" One-touch fitting for 12 One-touch fitting for 10 One-touch fitting for 3/8" NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 A, B ports mixed One-touch fitting for 12 Rc 1/4 Rc 3/8 G 1/4 G 3/8 A, B ports mixed SV4000 NPT 3/8 SV4000 Rc 3/8 NPTF 3/8 G 3/8 In the case of

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

JA/JAH/JB/JS

41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05 0.07 0.16 0.31 0.58 1.08 2.7 4.7 Option Pneumatic: Up to 1 MPa Hydraulic:

JA/JAH/JB/JS

38 47.5 56.5 68 94.5 112 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000

CV/MVGQ

12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) RE A B 100 110 120 15 90 1 REC 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL (n 2) 2 25 + 55 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 140 + 55 n = 4, 8, 12, 16 CX n (Same side) 15 75 90 90 100 100 110 110 Different

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 12 16 20 25 8 8 8 9.5 6.8 6.8 6.9 8.1 #8-32UNC #8-32-UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke

2–4

6 14 9.9 3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8,1 2, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 100 1 pc. 100 110 120 1 or 2 pcs. 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (different sides/same side) (n 4) 2 140 + 55 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 120 + 55 130 + 55 "n" pcs.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.