Vacuum System Peripherals:

0.9 MPa VG342 Model 3 position valve Series VEX3 Piping specifications Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22

Programless controller Step motor (servo 24 VDC)

[1] After confirming that OUT2 and OUT3 are turned on, turn on IN0 to IN2 to start (1) move to the position No. 7. (1)Reset stops during (2) (3)STOP (4) [2] When the operation starts, BUSY is turned on and NO.7 To NO.8 during NO.7 To NO.9 OUT0 and OUT1 are turned off.

Free Mount Cylinder Series CU

ANR)) 290 130 Free flow 1.5 7 3.5 Effective area (mm2) 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C Elbow Type (Metal body) Air Flow/Effective Area AS220M-02 AS120M AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420

JXCx-OMU0004

.67 RESET 87 STOP 9 53 97 NO.6 No.6 (3) NO.7 No.7 No.7 (1) NO.7 No.8 NO.8 (4) No.9 NO.9 (2) (1) 6 7 9 7 (2) 8 9 7 (3) 8 7 5 3 (4) 7 9 9 7 *1 PLC I/O 1No.7 (3)No.7 (1)NO.7 (3)NO.7 [1] OUT23 ONIN02 STOP 2 (4) (2) (4) RESET No.8 No.9 ON7 (1) NO.8 NO.9 RESET STOP OFF ON IN0 [2] BUSY ONOUT01 bit_0 OFF IN1 ON OFF [3] BUSY ON IN2 OFF [4] RESET [5] BUSY OFF [6] BUSY OFFRESET

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

C85

7 q !4 !1 w e !3 !

C85

Electroless nickle plating 1 1 1 1 1 1 1 1 1 2 1 1 2 2 1 1 1 2 2 1 1 2 2 q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

V100

Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

ZP

ZX Hexagon width across flats I ZR ZM ZH ZU ZL ZY ZQ Model A B D K L Y C E F C E F H: M6 x 1 H: M8 x 1 Model A B C K L Y D E G D E G H: M5 x 0.8 H: M6 x 1 G I G I ZF ZPT20B 20 25 22 27 ZPT06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 3 20 7 4 21 8 4 ZPT08B 49.5 50 55 ZPT32B 23.5 24 29 28.5 29 34 54.5 55 60 33.5 34 39 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13

AC Servo Motor Driver (CC-Link Type ）

LG NC 1 2 3 4 5 6 LG P5D RDP SDN SDP RDN LG NC 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

LJ1H

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 Compatible model 1 G LJ1 05 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

Electric Grippers

1 !2 !4 q u w e r t !7 Component Parts No.

LEC-OM07605CN

_ _ 1 F 290 7 7 7. 7.1.4 (1) VG2 ([rad/s]) = 1 + GD2 10 Pr.

Air Cylinder

1 !7 ! With auto switch 10, 16 r e o u i w y t !6 !5 !3 !4 !0 !2 !1 !7 ! With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

thread depth 13 (Insert) 7 22 Stroke adjuster at retraction end 7 2.5 (With stroke adjuster at extension end) 4.5 (With stroke adjuster at retraction end) 38 92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Electric Actuator

1 @6 @7 o @4 !5 !0 !6 @0 B A !9 !8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.