CLS

25 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5BAL D-F59F 125 135 135 150 150 (n 2) 2 n (Same side) (n 4) 2 (n 4) 2 (n 4) 2 25 + 55 125 + 55 135 + 55 150 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12,

Table of Contents

1 D side VS4 16 stations 16 Max. 16 stations.

MGG

21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F through, counter bore G Bottom 4-H Bracket (See table below

KJ

L06-03 L08-01 43 55 46 12 10 14 9 21.8 35.8 37.5 36 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 17 12 38 39.7 40.7 19 35.9 37.9 36.9 23.3 16 14 17 14 Connection thread 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R thread installation.

CNA

16 (n-4) 1 10+55 2 n=4, 8, 12, 16 (n-4) 120+55 2 n=4, 8, 12, 16 10 75 80 90 D-A59W With 1 n (Same) Different mounting 35 55 75 75 80 80 90 90 With 2 With n 15 90 100 110 120 With 1 With 2 (Different and same) With 1 Same side D-F5lW D-J59W D-F5BA D-F5lF D-F5NTL Different mounting n=2, 3, 4, 35+30(n-2) n=2, 4, 6, 8, 75+30(n-2) n=2, 4, 6, 8, 80+30(n-2) n=2, 4, 6, 8, 90+30(n-2) 25 110 120

JA/JAH/JB/JS

83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 112 200 300 500 1300 3100 5000 7900 15300

JA/JAH/JB/JS

1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05 0.07

MXS

0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16

CV/MVGQ

, 16 D-A59W n (Same side) 90 100 110 120 15 1 2 (Different sides, Same side), 1 25 110 120 130 140 D-F5NTL n = 2, 4, 6, 8 25 + 55 (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 140 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G59F D-G5NTL Same side

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5

High Vacuum Angle Valve

How to Order [Option] XLCV M9N A 16 1 G L Flage size 16, 25, 40 XLCV M9N A 50 1 1 G Flage size 50, 63, 80 XLCV q r t w y e u i o !1 !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

CL

4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 30 35 35 40 40 50 50 56 59 67 73 77 85 112.5 121 133 44 52 64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 69 78 84 92 100 141.5 150 167 16 20 20 25 30 36 36 40 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11

MNB

46 52 65 75 95 114 97 104 120.5 134.5 169 189 1/8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V W ZZ VA GA GB

CV/MVGQ

12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) RE A B 100 110 120 15 90 1 REC 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL (n 2) 2 25 + 55 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 140 + 55 n = 4, 8, 12, 16 CX n (Same side) 15 75 90 90 100 100 110 110 Different

CJ2

) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H Band mounting style (16) D-H7 D-H7W D-H7BAL D-H7NF D-A79W Rail mounting style (16) D-F7 D-J79 D-C73C D-C80C D-H7C D-F7V D-J79C D-F7W D-J79W D-F7BAL

2–4

in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95 Available in 5 mm stroke increments Example) Part number: CQMB3257 It is produced by installing a 18 mm spacer in a standard stroke cylinder CQMB32-75.

4/5 Port Solenoid Valve

] P R 31.5 B B B B B 3.2 31.2 P R (4.4) 32 15.3 7.5 17 16 A A A A A 1 (Station n) (Station 1) L1 L2 4.5 (Pitch) P = 10.5 (Light/surge voltage suppressor) 15.5 15.5 (Station n) (Station 1) + + (Light/surge voltage suppressor) A A 20 15 5 48.5[55.5] B B + + 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" (Pitch) P = 10.5 16 33.1 A A 20 15 B B 5 1 (Pitch) P = 10.5 16.5

AC

16 16 16 23 26 26 33 36 40 40 40 16 16 20 10 12.5 9.5 14.5 14.5 14.5 38.5 50 70.5 70.5 88 88 115 117.5 117.5 90.5 126.5 AC1020 AC2020 AC2520 AC3020 AC4020 AC4020-06 AC5020 AC5520 AC6020 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 181 191 225.5 230.5 309.5 323.5 323.5 Option For piping adapter AC2520, 3020, port size 1/2: 40mm For AC4020, port size 3/4: 50mm Metal bowl with level