MXS Series Air Slide Table

5 deep +0.030 0 HA GA NN-M6 X 1 thread 12 deep 6 A B 1.5 30 11 11 5.1 9.5 A B 29 11.5 29 11.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Note) Refer to "Dimensions" of MXS20 on P. 62 for one with shock absorber as symmetric.

MNB

500 to 600 to 600 to 750 to 750 1/8 1/8 1/4 1/4 1/4 1/4 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13 14 15.5

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

TABLE OF CONTENTS

/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Auto Switch Specifications/Refer to page 11-11-1 for further information on auto switch single body.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Auto Switch Specifications/Refer to page 11-11-1 for further information on auto switch single body.

CV/MVGQ

12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) RE A B 100 110 120 15 90 1 REC 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL (n 2) 2 25 + 55 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 140 + 55 n = 4, 8, 12, 16 CX n (Same side) 15 75 90 90 100 100 110 110 Different

SMC Pneumatic Clean Series

22 18 14 12 10 8 21.5 15 15 15 171 137 135 131 50 45 45 41 27 25 25 21 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 21 19.5 19.5 15.5 M10 x 1.25 M8 x 1.25 M26 x 1.5 M20 x 1.5 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M26 x 1.5 M10 x 1.25 23 10 8 3.2 134 M32 x 2 M14 x 1.5 With air cushion Relief port M5 x 0.8 H A K F AL Width across flats B1 H1 H2 GC GA

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

CM2

SCM220A, #11, #7 SCM220A, #11, #7, #19 CM2D25SCM225A, #11 SCM225A, #11, #7 SCM225A, #11, #7, #19 CM2D32SCM232A, #11 SCM232A, #11, #7 SCM232A, #11, #7, #19 CM2D40SCM240A, #11 SCM240A, #11, #7 SCM240A, #11, #7, #19 1.4-44 Series CM2 Front Trunnion (U) CM2U Bore size Stroke S T (mm) B1 N P Bore K MM NA NN E B2 D I A TD F AL TT G TX H TY H1 TZ Z 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

C95

9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45

Table of Contents

Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100

ISO Cylinder

24 8 18.3 16 14 10 9 22 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !