MXS

0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16

0.55

2B 2B 26.4 20 12 10 4A 4A (1.6) G: Approx. 300 H: Approx. 600 (Lead wire length) 40.7 (6) 65.4 (AC: 67.6) (Distance between ports) (13.4) (Indicator light) (10) 3EB (E type) 14.5 6 (AC) 38.6 42 (55) (45) 35 35 19.6 17.5 5EA M5 x 0.8 12 11.8 (16) 2 x 5.5 [5(EA), 3(EB) port] 30 (For mounting) (26) 1P 12.5 1 2.3 17.8 M5 x 0.8, 1/8" [1(P) port] (PE port) 42.7 10 12.8 2 x M4 x 0.7 thread depth

Floating Joint

-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 (CJ1) 10 (CZ1), 15 (CJ1) 15 (CZ1) 20 25, 32 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 14 18 22 26 30 36 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 15 17 23 23 30.5 34 38 47.5 56.5 68 94.5 112 23.2 26 34.5 34.5 44 49.5 60 74.5 89.5 110 152 178 7 9 12.5 12.5 17.5 19.5 20 25 29 35 42 52 8 10 14 14 45 55 12 12 16 16 21 24 31

MNB

500 to 600 to 600 to 750 to 750 1/8 1/8 1/4 1/4 1/4 1/4 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13 14 15.5

Cylinder with Lock

to 750 45 to 750 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 50 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

KJ

26 Applicable tubing 15 20.5 24.5 14.5 15 20.5 24.5 26.5 4 10.4 16 3.4 3.4 17 1 8 1 4 32 34 10 14 10 18 18.5 M5 x 0.8 M6 x 1.0 3.4 3.4 8 27.5 8 Connection thread 6 17 1 8 12.8 33 35 36.5 10 14 17 12 14 17 8.7 6.9 1 4 10 18 3 8 1 8 22 26 28 37 39 41 1 4 20.5 18.5 8 15.2 12 19.7 19.7 3 8 Applicable tubing 1 8 24 27 29 33 27.5 29.5 33.5 32 35 42 43.5 45 47.5 45.5 47.5 49.5 55 56.5 1

CV/MVGQ

For detailed specifications, refer to page 10-20-1.

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

CNA

8 1/8 44 10 15 16 32 10 85 15 52 16 12 12 10 8 to 500 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 to 600 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 to 600 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 to 750 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 to 750 (mm) Bore (mm) 40 50 63 80 100 K J

JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

38 47.5 56.5 68 94.5 112 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000

KQ2

1 8 1 4 1 8 5 32 10.4 10 18 16 3 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 1 2 Connection thread 3 8 1 2 21.7 17 28 22 9.6 1 2 Note) D1: Max. diameter Double Universal Male Elbow: KQ2VD H (Width across flats) <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 125 25 135 150 25 + 55 (n2) 2 125 + 55 (n4) 2 135 + 55 (n4) 2 150 + 55 (n4) 2 n pcs. (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 145 35 155 170 D-F5NTL 35 + 55 (n2) 2 (n = 4, 8, 12, 16) 145 + 55 (n4) 2 155 + 55 (n4) 2 170 + 55 (n4) 2 n pcs.

ZP

32 40, 50 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, Rc M5 x 0.8, M6 x 1, M8 x 1.25, Rc M6 x 1, M8 x 1.25, Rc 1 8 1 8 Mounting Use connection for vacuum entry Pad Type Flat with ribs Deep Bellows Pad form Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13

Basic type / Direct mount type Series CY3B/CY3R

111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 A 4 4 4 8 8 8 10 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 M 30 NA x M5 x 0.8 thread depth 6.5 KA 21 5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28