Tie-rod Type Hydraulic Cylinder

(same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 1 pc. 100 100 110 120 15 1 or 2 pcs. (different surfaces/same surface) 120 120 130 140 D-F5W, J59W D-F5BA D-F59F D-F5NT 15 140 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 (n 2) 2 120 + 55 120 + 55 130 + 55 "n" pcs.

CA2

+ 55 n = 2, 4, 6, 8 90 + 55 (n 4) 2 n = 4, 8, 12, 16 (n 2) 2 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 D-A59W n (Same side) 120 110 100 15 90 1 2 (Different sides and same side) 1 140 130 120 110 25 D-F5NTL (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 n = 4, 8, 12, 16 140

CL

63 80 100 14 18 18 22 26 71 80 99 117 131 11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 1/4 3/8 3/8 1/2 1/2 6 7 7 11 11 MGQ MGG MGC CLAB40SCLA40, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB63SCLA63, #1 (#1+#11) CLAB80SCLA80, #1 (#1+#11)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

sides, Same side), 1 35 145 155 170 -XC10 Dual stroke cylinder/Double rod type D-F5NTL (n 2) 2 (n 4) (n 4) 2 (n 4) 2 -XC11 Dual stroke cylinder/Single rod type 170 + 55 n = 4, 8, 12, 16 145 + 55 n = 4, 8, 12, 16 35 + 55 n = 2, 4, 6, 8 155 + 55 n = 4, 8, 12, 16 n (Same side) 2 -XC14 Change of trunnio bracket mounting position 35 100 2 Different sides Same side 110 110 150 150 -XC15 Change

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Table of Contents

41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22

Air Cylinder

to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 54.5 19 26 16 50 8 47 M6 x 1 6 14 4 7 30 51 (60) 3 54 71 4 M14 x 1.5 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 70.5 27 32 20 58 11 58 M8 x 1.25 7 18 5 10 40 55 (67) 4.5 66 86 5 M18 x 1.5 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 82.5 27 38 20 58 11 72 M10 x 1.5 7 18 5 12 45 55 (67) 4.5 82 106 5 M18

Air Cylinder Series MB

D-A3 D-G39 D-K39 n (different side) n (same side) 1 10 2 (different side) 2 (same side) 35 55 35 + 30 (n2) n = 2,3,4... 55 + 50 (n2) n = 2,3,4... n (different side) D-A44 n (same side) 1 2 (different side or same side) 1 10 15 20 20 D-A5 D-A6 (n2) 2 (n2) 2 (n2) 2 20 + 55 n = 2,4,6,8... 15 + 55 n = 2,4,6,8... 20 + 55 n = 2,4,6,8... n (same side) 2 (different side or same side) 20 25 25 (n2

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

ISO Standard Hydraulic Cylinder

8 ) Note 1) 14 16 18 (n 2) 2 20 + 55 8 9 10 12 14.5 D-D-F5NT 25 (n = 2, 4, 6, 8 ) Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 100 + 55 100 + 55 110 + 55 120 + 55 20 + 55 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 15 100 110 120 1 pc. 100 1 or 2 pcs. (different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1) 20 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 90 + 55 (n 4) 2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) D-A59W 1 15 90 100 110 120 2 (Different surfaces, same surface), 1 25 110 120 130 140 D-F5NT n (Same surface) (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n

Battery-less

1 !

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

Table of Contents

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

Proposals for Energy Saving

B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mA DC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow value Min. measured

Fluoropolymer Piping Equipment

3/8" 3/4" 1/2" 20 29 24 17 26 21 44 54 49 23 39 28 5.8 LQ1T5A-R32 1/4" 3/4" 1/4" 39.5 20 36 17 46.5 55 46.5 49 23 3.6 LQ1T6A-R2 1" 1/2" 1" 8 39.5 24 20 20 29 14 28 TD TID 7 TH TIH 9 LQ1T6A-R3 1" 3/8" 1" 5.8 LQ1T6A-R4 1" 1/4" 1" 20 17 55 47.5 55 23 3.6 LQ1T6A-R5 3/4" 1" 1" 8 39.5 18 36 36 69.5 69.5 69.5 49 15 LQ1T6A-R6 1/2" 1" 1" 24 21 54.5 28 9 LQ1T6A-R7 3/4" 3/4" 1" 39.5 36 69.5

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16