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www.stevenengineering.com I 2.10 SOLENOID VALVES SERIES SY3000/5000/7000 M A N I F O L D O P T I O N S BLANKING PLATE ASSEMBLY INDIVIDUAL/EXH SPACER ASSEMBLY INDIVIDUAL/SUP SPACER ASSEMBLY Series Assembly No Port Size Series Assembly No Port Size SY3000 SY3000-38-1A M5 (10-32Nom) SY3000 SY3000-39-1A M5 (10-32Nom) SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

AXT625-4-1#1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-6 AXT625-28-1A (Terminal section with adapter plate) No.

VZ5000

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

New

VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A Air operated type VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A Solenoid valve type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ1000 VVQ1000-1A-2-C3 VVQ1000-1A-2-C4 VVQ1000-1A-2-C6 VVQ1000-1A-2-M5 Port size With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 thread For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

Large Size Vacuum Module: Series ZR

ZR1-SR2-66-A(a set of four threads) ZL Standard (Without options) Standard (Without options) With function plate Standard (Without options) With function plate Standard (Without options) With function plate Standard (Without options) With function plate 12 ZR1-SR2-18-A(a set of six threads) ZR1-SR2-33-1A(a set of two threads) 13 ZY ZR1-SR2-39-1A(a set of two threads) ZR1-SR3-54-A(a set of

Lubrication Equipment

ALD600 ALD900 12612AP Valve guide assembly Pilot body assembly e r 12609AP Epoxy resin with glass fibre Bowl assembly 126139-1A 126059-1A t 126115AP GA46-10-01 AF11-2 126140 11307 126115AP GA46-10-02 AF11-2 126060 11307 126046 126047 Zinc die cast, NBR Lubrication plug assembly Pressure gauge (2 pcs.) Bowl assembly Sealing (2 pcs.) O ring Seal Seal y u i o NBR NBR NBR NBR !0 !1 !

VP300/500/700

Series VP342 VP542 VP742 VP300-27-1A VP500-27-1A VP700-27-1A Bracket (With screw) Use external pilot model in the following cases: Body ported For vacuum or for low pressure less than 0.2 MPa Please consult with SMC for use in a vacuum hold application.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note) Electric current should be 1A or less.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Title not found

1a va ve functon Nole 2) For NPTlhread type.

Electric Actuator with Integrated Guide

RY (Relay): Rated contact load 24V DC, 1A or more, A contact When the AC power supply (100V AC or single phase 200V AC) is shut off, use a relay to shut off 24V DC. Note) In case of the standard Series LTF product. Caution Danger 1. A regenerative absorption unit is required depending on actuator operating conditions.

Vacuum

(NVJ114) u,1A K1 o a K3 a o K5 o a a o (blank) Wilhout valve unit Nzxl!fl1-K1sLz-EC NZXIEEl-K3sMZ-EC NZSE2 NZX100-Kls|-z-EC NA(100-K35MZ-EC E I PS>_ - illX $enie Manifold Specif ications air supply / or external vacuum (NZX1 Basic weioht for two station: 1.7 lbf Additional wei6ht for each extra station: a a a A PO o.otls arc Ftugged as slendad (PS portsj p/uggd tor ejector W).

Vacuum

(NVJ114) u,1A K1 o a K3 a o K5 o a a o (blank) Wilhout valve unit Nzxl!fl1-K1sLz-EC NZXIEEl-K3sMZ-EC NZSE2 NZX100-Kls|-z-EC NA(100-K35MZ-EC E I PS>_ - illX $en Manifold Specif ications air supply / or external vacuum (NZX1 Basic weioht for two station: 1.7 lbf Additional wei6ht for each extra station: a a a A PO o.otls arc Ftugged as slendad (PS portsj p/uggd tor ejector W).

AC Servo Motor Driver (Pulse input type)

Troubleshooting . 67 8.1 Alarms and warning list . 67 8.2 Alarm Display . 68 2 - LECSB Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VS 8-2/VS 8-4

SOL.A 1A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 1B Station 1 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A SOL.B 2B Station 2 1. How to Order Indicate option symbol -K in the manifold part number and be sure to specify station positions for single or double wiring on the manifold specification sheet. 2.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

ALD600 ALD900 12612AP Check valve assembly Pilot body assembly e r Maintenance 12609AP Warning Glass fiber-inserted epoxy resin t Bowl assembly 126139-1A 126059-1A 1. Before removing the oil filler plug, loosen it two and a half turns to completely release the pressure inside the case.