7.4

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

CM2

50 75 206 232 256 282 332 25 17 36 32 72 85 97 110 135 12.5 25 37.5 50 75 208 234 258 284 334 32 19 46 41 77 90 102 115 140 12.5 25 37.5 50 75 242 268 292 318 368 40 With Air Cushion Built-in One-touch Fittings ZZ (One side) Bore size (mm) Bore size (mm) Q WB P WA N1 G Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 21.5 8.5 6 13 8 17.5 25 25 20 171 184 196 209 234

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

With(Wihtout light) Note) Standard lead wire length: 300mm Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 23 Series VQZ 3 Port Solenoid Valve Manifold Options Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 Used to reserve a valve mounting space on the manifold for future use.

ISO Cylinder

20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5

SMC Pneumatic Clean Series

, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25

CM2

185 185 190 20 25 32 40 24 24 24 25 36 36 36 46 With rod boot (mm) ZZ Symbol Z 1 to 50 143 147 149 181 l 1 to 50 63 67 67 71.5 Stroke 1 to 50 12.5 12.5 12.5 12.5 Bore 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

Table of Contents

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

MHZ2/MHZJ2

1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

1

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

CRB2/CRBU2/CRB1

Model Basic type CRB1LW 50 CRB1LW 63 CRB1LW 80 CRB1LW100 Foot bracket assembly no.

C76

Same side Different sides Same side Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.