7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

VM

VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

15.6 23.1 27 24 35 ZFC201-07 1/4" ZFC201-09 5/16" 1113 Series ZFC Element Replacement Element replacement procedure 4.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold Gasket DXT199-21-11 Refer to page 92 prior to handling.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Such a place is likely to cause malfunction. 42 Series EX260 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and Operation Manual for 3/4/5 Port Solenoid Valve Precautions.

0.55

Pg7 3.5 to 7 30.5 64.3 56.8 (AC) 53.1 46.1 (AC) 42 35 19.6 45.3 35.5 47.5 (AC) 30 37.7 (AC) 30 28 Series VF1000/3000 Dimensions (mm) VF3000 1/8", 1/4" [4(A), 2(B) port] 2 x 4.3 (For mounting) 25.5 10 Manual override 4A 1 26.4 20 2B 23 19 (1.6) 66.2 G: Approx. 300 H: Approx. 600 (Lead wire length) (6) 90.9 (AC: 93.1) (Indicator light) 55.5 (10) (E type) (AC) 38.6 42 (45) (55) 31.5 35 35 19.6

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 13 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 01T (NPTF1/8)