Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

SYJ300/500/700

VFN 4-4-43 44 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -

KQ2

(inch) Min. port size Applicable tubing Note) B E T (UNF) D Mounting hole Mass (g) M Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 1/2-20 9/16-18 9/16-18 3/4-16 7/8-14 1-12 15.5 16 16.5 17 18.5 21 22 17.46 17.46 17.46 17.46 22.23 25.4 28.6 13.5 13.5 15 15 20 23 26 27 26 32 29 53 85 105 9.6 10.4 11.4 13.2 15.2 17.9 21.7 2.5 3 3.5 4.6 6 7 9.6

OMU0023

operation 4 01 05 001A FF00 sent.

KJ

KQ 2 H 05 S 34 M H With thread seal Nil None S With thread seal One-touch fittings D Applicable tubing O.D.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SS3YJ7-21 SS3YJ7-21R Manifold base Manifold base 2.2-39 Series SYJ700 Manifolds for Internal Pilot 20/21 Type How to Order Applicable solenoid valve SYJ712-l-01 SYJ712M-l-01 SYJ722-l-01 SYJ722M-l-01 Applicable blank plate ass'y SYJ700-10-2A A Port Rc (PT)1/8 SS3YJ7-20 -05 A Port Rc (PT) 1/8 Valve model Stations 20 Type 20 2 stations 02 P Port Rc (PT)1/4 P Port Rc (PT)1/8 21 Type 21 .. ..

3 Port Air Operated Valve Series SYJA300

VFN 4-4-43 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -

5

Bore size (mm) B D E F M T1 T2 RZQ Applicable air cylinder bore YA-03 32, 40 18 6.8 16 6 42 6.5 10 03 For 32, 40 05 For 50, 63 08 For 80 10 For 100 YA-05 50, 63 20 9 20 8 50 6.5 12 Mounting bracket YA-08 80 26 11 25 10 62 8.5 16 YA Type A mounting bracket YB Type B mounting bracket YU Joint YA-10 100 31 14 30 12 76 10.5 18 Part no.

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

VZ100/300/500

VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

Smooth Cylinder/Low Speed Cylinder

YA 03 YA-03 32,40 6.5 10 18 6.8 16 6 42 YA-05 50,63 6.5 12 20 9 20 8 50 Applicable air cylinder bore YA-08 80 8.5 16 26 11 25 10 62 03 05 08 10 For 32, 40 For 50, 63 For 80 For 100 YA-10 100 10.5 18 31 14 30 12 76 Mounting bracket YA YB YU Type A mounting bracket Bore size (mm) U V W Weight (g) Part no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

D3 For 3 stations 10 SS5V U 1 05 16 1 D P D20 For 20 stations Note) For D0, only DIN rail mounting bracket is attached.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Calle 18 69-05 Apart.

Series SV

Mounting 20 Tie-rod base 20 stations Direct mount DIN rail mount (with DIN rail) DIN rail mount (without DIN rail) Nil D D0 D3 SS5V W 1 05 U 10CD Note) When a DIN rail longer than the specified stations is required. (Specify a rail longer than the standard length.) Cassette base For 3 stations SS5V W 05 16CD 1 U ... ...

VM

Adjustable roller lever VM830-01-13 JIS Symbol Black nylon roller Adjustment length 26 to 89 Hexagon socket head cap screw Depth 15 At lever length 38.1 mm 20 P.T. 20 N F.O.F. 4-5.1 mounting hole 30 O.T. 50 T.T.

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

2/3 Port Valve

1) 05 10 VXFC -2 05 10 VXFC -5 100V AC 200V AC 05 10 3A 1A 24V DC Power supply fuse ON time OFF time Time repeatability 0.01 to 1sec 0 to 120sec Max. 20% of set time 5, 10 0 to 50C 35 to 85% (No condensation allowed) MAX. 1A MAX. 0.5A 2000V Time setting How to Order Controller Number of output points Operating ambient temperature Operating ambient humidity Ouput current Noise resistance

High Purity Chemical Valve

Inch sizes LQ2 integral fitting 03 05 07 1/8 3/16 1/4 Basic size With reducer Construction q e w Parts list Description Material No. 1 Actuator section PPS 2 Body PFA 3 Diaphragm PTFE r t y 4 End plate PPS 5 Nut PFA 6 Insert bushing PFA 469 Series LVC Dimensions 30 A R 30 54.5 39.5 P Pilot port M5 x 0.8 Breathing port M3 x 0.5 PB 40.5 13 PA 66.5 SMC SMC 35.5 SMC 22.5 4 79 11.5 4 x 3.5 20

Fieldbus system EtherCAT compatible SI Unit

+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.