0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

Magnetically Coupled Rodless Cylinder

59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN s s TF s s CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 +0.012 0 CY1F15 M5 x

KR

(mm) <M5> Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

Smooth Cylinder/Low Speed Cylinder

22 16 16 19 23 27 15 20 26 32 40 11 14 16 20 24 24 32 40 50 62 18 25 30 38 48 4 6 8 10 12 5 6 8 10 7 7 9 10 11 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 Note) 16.5 19 21.5 23 R T With auto switch Note) 5 stroke (CUX16-5D): 14.5 mm Without auto switch

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

MY1

C 3.5 4.5 5.5 6.5 8.5 10.5 12.5 G 8.5 10.5 16 19 23 25 27.5 GB 16.2 20 24.5 30 36.5 37.5 39.5 H 40 46 54 68 84 107 130 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 LH 22.5 23 27 35 38 29 32.5 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 (LL) 40

C85

x 0.8 M12 x 1.25 86 7 9.5 11.5 15 19 46 28 10 12 16 16.7 7 5 12 4.2 6 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 86 7 9.5 4 11.5 15 19 46 28 10.5 12 16 16.7 7 5 12 4.2 6 12 12 M6 x 1 M5 x 0.8 M16 x 1.5 105 10 10.5 6 12.5 18.3 24 5 50 38 14 17 22 19.7 8 6 16 6.2 8 16 16 M6 x 1 M5 x 0.8 M16 x 1.5 111 10 10.5 6 12.5 18.3 24 5 56 38 14 17 22 19.7 8 6 16 6.2 8 16 20 M8 x 1.25 G 1/8 M22 x 1.5 126 13

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

C85

x 0.8 M12 x 1.25 86 7 9.5 11.5 15 19 46 28 10 12 16 16.7 7 5 12 4.2 6 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 86 7 9.5 4 11.5 15 19 46 28 10.5 12 16 16.7 7 5 12 4.2 6 12 12 M6 x 1 M5 x 0.8 M16 x 1.5 105 10 10.5 6 12.5 18.3 24 5 50 38 14 17 22 19.7 8 6 16 6.2 8 16 16 M6 x 1 M5 x 0.8 M16 x 1.5 111 10 10.5 6 12.5 18.3 24 5 56 38 14 17 22 19.7 8 6 16 6.2 8 16 20 M8 x 1.25 G 1/8 M22 x 1.5 126 13

ZP

Form w 1 Material e Width across flats K A Connection thread 10 13 A5 38 17 2.5 M5 x 0.8 M3 x 0.5 3.5 21 8 4 8 16 38.5 17.5 10 13 43 17 2.5 M6 x 1 M3 x 0.5 3.5 26 8 4 8 16 43.5 17.5 20 25 45 19 C2 N S U F GN GS A6 ZP T U Construction p. 117 32 45.5 19.5 40 50.5 24.5 12 50 51.5 25.5 20 25 A8 Adapter Assembly p. 121 40 24 4 M8 x 1 M5 x 0.8 5 16 12 4 12 32 40.5 24.5 40 4.2 50 41.5 25.5 1 N:

SX

G) 2-M5 x 0.8 (External pilot port) Manual override (Press and turn for the locking type.)

30

Connection thread L2 M 17 8 26.1 16 16.1 19 M15 x 1 L1 19 10 41.5 19 17 19 21 M18 x 1 21 24 12 58.3 96 113 21 18.6 24 M20 x 1 16 20.8 28 30 29 M27 x 1 Note) Value of FEP tube.

Free Mount Cylinder Series CU

15.5 19.5 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 Note) 16 16 19 21.5 22 22.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18 25 30 38 48 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)