High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

ZR

17 Series ZR Vacuum Switch + Suction Filter Unit: ZR1-F Specifications Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VQ5 Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 mounting hole ~ =4.5 ~ =4.5 M2.5 mounting hole Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw

EtherNet/IP TM Compatible Fieldbus System

OUT1 16 OUT115 OUT114 OUT113 OUT112 Slave Diagnostic setting 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 connection diagnosis 32 point 9 COM_D COM_C COM_B COM_A switch diagnosis -: Unused 23 No.EX-OMS0014-A Diagnostic data Diagnostic information Input data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1

Large Size Vacuum Module: Series ZR

Vacuum release ON OFF OFF OFF ON OFF Combination Symbol : C4 Feature: Adsorption of workpieces and release of vacuum are switched by double solenoid valve.

Table of Contents

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.

Intrinsically Safe Valve

No. 1 (+), No. 2 () 0.75 mm2 5.9 23 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 19 18 9.5 2 A B C 53-SY5 40(R)-L-02 37.2 15.5 15.5 48 4 2 x 4.3 (For mounting) M5 x 0.8 (External pilot port) 4 Insulator: Black () B A 17.5 17.5 B A PE Insulator: Red (+) X Manual override P EB EA 35 17 17 56 62.5 65.4 M5 x

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

4 One-touch fitting SZ360--C4 3 position 87.6 4 position 84 73.5 80.2 2 position C6 6 One-touch fitting SZ360--C6 84.1 3 position 4 position 81 68.3 75 2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

Valve Single Unit

How to Order Port Block Assembly Only replacement of the fittings assembly is possible. 000 6A SY Metric size One-touch fitting for 6 One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-50A-C6 SX3000 VVQ1000-50A-C4 Series Thread type One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 Symbol Series Nil Rc 3 SX3000 SX5000 VVQ1000-51A-C6 VVQ1000-51A-C8 G F 5 SX5000 N NPT 7 SX7000

ARM10/11

17 5.

ARM10/11

17 5.

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

Proposals for Energy Saving

17 17 22 22 26 26 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 27 27.7 30.1 30.8 31.5 33.8 34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16

Manifold Specifications

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Table of Contents

Symbol: C4 Symbol: C1 Add connection ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Symbol: C4 Symbol: C1 Add connection ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.

CRB2/CRBU2/CRB1

Symbol: C4 Symbol: C1 Add connecting ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Symbol: C4 Symbol: C1 Add connection ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.