4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L n L: Dimensions n: Stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 173 185.5 185.5 198 210.5 223 235.5 248 248 260.5 273 285.5 298 298 310.5 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 287.5 300 140.9 150.9 160.9 170.9 180.9 190.9 200.9 210.9 220.9 230.9 240.9 250.9 260.9 260.9 280.9 16 17.5 12.5 13.5 15 16 17.5 18.5 13.5 15 16 17.5 18.5 18.5 15 47 Series

Valve Single Unit

(Coil temperature: 20C, at rated voltage) SX3000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor S, Z type 15 or less 2 position single 10 or less 13 or less 2 position double 15 or less 20 or less 3 position 12 or less SX5000 With light/surge voltage suppressor Response time (ms) (at the pressure

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor unit Monitor unit Monitor unit (15 to 35C) 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(for 4) C6 (for 6) M5 (M5 thread) 4.5 (0.25) 12 or less 15 or less VQ1130 Metal seal 3 position 2 position Single VQ1 30 Side 1 to 16 stations Options: 6.3 (0.35) 15 or less 20 or less VQ1131 Rubber seal VQ1000 VV5Q13VQ1 31 424 57 Built-in silencer Direct exhaust 4.5 (0.25) 12 or less 15 or less VQ1230 Metal seal Double (latching) 6.3 (0.35) 15 or less 20 or less VQ1231 Rubber seal Valve

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

2-Color Display Digital Flow Switch Series PFM

min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number of needle rotations Number of needle rotations 930 2-Color

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

Manifold Specifications

VV5ZS2 C6 06 51G 1 VFN Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Plug-in type Stacking type manifold base with attachment plug lead wire NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2 stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 15 stations 15 Symbol Max. 15 stations.

Compact Vacuum Unit

Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

VZ100/300/500

(Valve) DXT201-15-6A1 pc. (Blanking plate assembly) DXT201-15-4A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Table of Contents

nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

smcmaintenancepartslist

Qty. 1 MY3B16 MY3B25 MY3B40 MY3B63 9 Seal belt MY3B16-16AStroke MY3B25-16AStroke MY3B40-16AStroke MY3B63-16AStroke Polyamide 10 Dust seal band MY3B16-16BStroke MY3B25-16BStroke MY3B40-16BStroke MY3B63-16BStroke 1 Stainless steel 15 Tube gasket RMB-16 RMB-25 RMB-40 RMB-63 2 NBR 16 Piston seal RMY-16 RMY-25 RMY-40 RMY-63 2 NBR 18 Scraper MYA16-15-R6656 MYA25-15-R6657 MYA40-15-R6658 MYA63-15

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C8 C4 C6 C8 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5Y5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5

ZR

nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate