REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

Metal Seal/Rubber Seal Series VQ Body Ported

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

It is calculated using the following formula. 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

Table of Contents

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

5 Port Solenoid Valve

4.1 2 x M5 x 0.8 3(R2) port 7.3 36.2 Station 1 2 3 4 5 6 7 8 n D side U side Grommet 300 (Lead wire length) 48 36.2 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) Plug Lead Manifold Bar Base 16.5 11 2n x V4, V3, V2, M3 (4(A), 2(B) port) V4: 4 x 2.5 V3: 3.2 x 2.0 V2: 2 x 1.2 M3: M3 thread 3.5 14.4 Indicator light With plug connector / light Plug Lead Single Unit Formula L1 = 7.5n

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Series PF2W Digital Flow Switch For Water

(Fixed SI unit [L/min, or L, m3 or m3 x 103] will be set for switch types without an unit switching function.)

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Sine Rodless Cylinder Series REA/REB

Table (3) Recommended Speed Controller Bore size (mm) Model Elbow type Straight type In-line type AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 10 15 20 25 32 40 50 63 Caution AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 1.

REA/REB

-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Pin Cylinders Series CJP2/CJP

M3 AS1001F-23 3.2 AS1211F-M5-23 AS1311F-M5-23 M5 AS1211F-M3-04 AS1311F-M3-04 M3 AS1001F-04 4 AS1211F-M5-04 AS1311F-M5-04 M5 AS1001F-06 6 AS1211F-M5-06 AS1311F-M5-06 M5 For details about one-touch fittings, miniature fittings and speed controllers (applicable tubing O.D. 2 only), refer to the catalog ES50-25 (B edition or later).

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Mounting screw tightening torques 10-SV1000 SV1000-67-1A M2: 0.15 Nm M3: 0.6 Nm M4: 1.4 Nm 10-SV2000 SV2000-67-1A 10-SV3000 SV3000-67-1A 10-SV4000 SV4000-67-1A Plug (White) These are inserted in unused cylinder ports and P, E ports.

Fieldbus system EtherCAT compatible SI Unit

50x2:0 2 Under range error 2 UNSIGNED8 Number of Channels 50x2:01 2 50x2:04 Channel 0 2 Channel 3 Enum081C 0=No error 1=Error 50x3:0 Over upper limit error UNSIGNED8 Number of Channels 50x3:01 50x3:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 50x4:0 Under lower limit error UNSIGNED8 Number of Channels 50x4:01 50x4:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 1: x = Unit

SYJ300/500/700

VZ VS VFN 4-4-11 Series SYJ300 Manifold for Internal Pilot Type Type 20 Applicable solenoid valve SYJ312--M3 SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3 20 05 Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than 10 stations, supply air to