51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

Intrinsically Safe Valve

EXH port) Manual override 4 x 4.5 (Mounting hole) 125.6 42.2 EB P EA A A A A X PE 26.6 26 21 21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5 M22 x 2.5 19 26 21 34 37 44 50 56 66 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 86 107 120 138 150 171 198 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 25 30 36 45 55 68 87 21 24 30 36 46

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

reduces flow setting time

13.2 30.1 21.5 40 14.2 16 AS231FS1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FS1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FS1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FS1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FS1-02-09 (S) 5/16 13.2 37.1 23.5 59.9 14.2 50 AS331FS1

MU

These are installed with double clevis style and double knuckle joint style as standard. 2.4-17 Plate Cylinder Series MU Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (mm) (mm) Applicable pin Model MUl25 MUl32 MUl40 MUl50 MUl63 Z LX RR 8.5 10 11 16 16 LD LU 11 14 15 20 20 LC 16 18 20 28 28 LB 27 31 36 46 46 Z LA 35.5 41 47 62 62 LX RR 8 10 10 16 16 LB 27 31 36 46 46 L 52.5

Compact 5-Port Solenoid Valve

() (+) 19 Station 10 COM. () 20 SOL.a () () 22 21 Positive common Negative common Station 11 SOL.b SOL.a SOL.b () () 24 23 Station 12 COM.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference

Round Type Hydraulic Cylinder

17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

A

M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L1 With auto switch Without auto switch Standard stroke (mm) Bore (mm) L LD LG LH LT LX LY LZ X Y Inch Metric 24 25.5 28.5 32.5 LS 15 15 24 24 B 27 27 36 39 A 54 54 65 69 LS 10 10 14 14 B 22 22 26 29 A 49 49 55 59 12 16 20 25 21.5 21.5 22.5 24.5 13.5 13.5 14.5 15 5 to 30 5 to 30 5 to 50 5 to 50 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8

Integrated Controller

Size Order no. 27 16 LE-D-2-7 25 LE-D-19-3 32 LE-D-19-4 Replacement Parts/Grease Pack Applied portion Order no.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8