Basic type / Direct mount type Series CY3B/CY3R

2.5 118 16.5 9.2 115 M6 x 1 8 7.5 Rc (PT) 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 29 Note 1) These dimension drawings indicate the case of piping port location Nil.

MY1

Refer to page 46.

F

26.5 27 48 21 40 5/16 3/8 KQY09-U03 17.46 15.2 12 23.5 25.5 43 18.5 6 10 12 KQY10-U04 22 18.5 17 26.5 30 49 21 40 3/8 1/4 KQY11-U02 17.46 17.9 17 25.5 26.5 46 21 7 12 14 KQY12-U02 17 20.9 17 28.5 27 49.5 22 57.4 3/8 3/8 KQY11-U03 17.46 17.9 17 25.5 27 46.5 21 7 12 38 KQY12-U03 17 20.9 17 28.5 28 50.5 22 57.4 3/8 1/2 KQY11-U04 22.23 17.9 17 25.5 30 47.5 21 7 12 12 KQY12-U04 22 20.9 17 28.5

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

171 187 203 219 235 251 17 15 13.5 11.5 16 14.5 12.5 17 12.5 12 11 13 14 15 16 17 18 19 20 Stations n L1 L2 L3 L4 298 310.5 323 348 360.5 373 398 410.5 423 435.5 287.5 300 312.5 337.5 350 362.5 387.5 400 412.5 425 267 283 299 315 331 347 363 379 395 411 15.5 13.5 12 16.5 14.5 13 17.5 15.5 14 12 1.2-136 Type45 Base Mounted Type SY3000/5000 C4 C6 C8 SS5Y5-45FDStations U-Q Scale: 30% C4 C6

VM

VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion

Battery-less

x M5 x 0.8 thread depth 10 5 +0.03 +0.01 depth 5 Auto switch mounting groove (2 locations)5 17 5 +0.03 +0.01 depth 5 6 7.5 A 53.4 46 45 44 29 45 24 A 32 C 22.5 51.7 0.3 46 (D/21) x C 65 51 Table operating range1 2 [2] Origin2 21 E D x M5 x 0.84 [Stroke end] 6.54 9 Stroke end [Origin]3 26 A-A G 116 + Stroke 23.5 Stroke F 4H9 ( +0.030 0 ) depth 4 41 29 5 4H9 ( +0.030 0 ) depth 4 42 6 x M5 x

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV H J K L M O1 R S 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 178.5 160 63 50 to 200 192.6 155.2 21 40 76 82 M16 x 2 44 36 37.4 60 M8 x 1.25 16 80 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range

Mechanically Jointed Rodless Cylinder Series MY1

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

High Purity Fluoropolymer

CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.

5-Port Solenoid Valve

or less 17 or less Metal seal SY72l1 17 or less 17 or less 16 or less 16 or less 16 or less 16 or less Rubber seal SY73/4/5l0 3-position 52 or less 54 or less 47 or less 42 or less 46 or less 40 or less Metal seal SY73/4/5l1 38 or less 45 or less 39 or less 33 or less 38 or less 34 or less Rubber seal SY7A/B/Cl0 4-position dual 3-port valve 52 or less 60 or less 54 or less 49 or less 53

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21

Cylinder with Lock Series CLS

36 19 106 338 9 118 275 30.5 M16 x 1.5 46 Up to 1800 1801 to 2000 30 63 60 204 106 36 167 195 3/8 162 45 115 70 48 17 18.5 149 86 135 20 41 24 125 398 10 132 320 35 5 M18 x 1.5 16 118 Up to 1800 1801 to 2000 34 63 60 226 124 40.5 187 216 3/8 182 50 115 74 48 17 18.5 165 97 135 20 46 24 132 418 10 150 348 35 5.5 M20 x 1.5 21 131 Up to 2000 2001 to 2400 42 71 67 277 152 58 237 261.5

Cylinder with Lock

1.25 17 4.5 4 6 6 5.1 2 37 254 63 Up to 2000 69 4 M16 x 1.5 14 200.5 5 8 16 56.5 M8 x 1.25 17 5.5 4 9 9 6.3 2 37 273.5 80 Up to 2000 86 5 M20 x 1.5 20 238 10 16 72 M10 x 1.5 22 7.5 4 11.5 11.5 6 6 46 328 100 Up to 2000 91 5 M20 x 1.5 20 261.5 10 18 89 M10 x 1.5 26 9.5 4 17 17 10 3 51 356.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

17 Series CY3R Construction Both sides piping type CY3R15 to 40 !

SYJ300/500/700

9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A

Prevents Micro-Bubbles

Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools. Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

CV/MVGQ

32 36 17 72 85 97 110 135 160 25 37.5 50 75 100 12.5 185 125 17 72 32 36 85 97 110 135 160 25 37.5 50 75 100 190 12.5 125 41 46 19 77 90 102 115 140 165 25 37.5 50 75 100 Long stroke type includes ones for strokes more than 301 mm. 10-15-21 22 Series CVM5 Axial Foot Style (L) Bore size Stroke CVM5L Manual override Width across flats B1 Width across flats B2 Width across flats NA Mounting

CV/MVGQ

0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) f B3 e 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.

10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15