Electric Slide Tables D x M5 x 0.8 thread depth 6.5 Note 4) (D/2 1) x C C 19 3 x M5 x 0.8 thread depth 8 Table operating range Note 1) 1 [1] 8 K Origin Note 2) [Stroke end] Stroke end [Origin] Note 3) LECA6 LECP6 LEC-G LECP1 LECPA 16.5 N 13 (M) Stroke (2.3) 4H9 ( ) depth 4 (G 1) x F 18 F +0.030 0 40 (25) 5 J +0.030 0 4H9 ( ) depth 4 With lock Connector Servo motor Step motor 20 24 Motor cable (2 x 5) Motor
95 91.5 113 16.2 9 80 53.5 13 7 59 4.5 118 114 140 19.5 11 L1 Rod end nut 100 53.5 13 7 71 6 137 136 162 23 12.5 Front flange type: CLQF/CDLQF FV M Front flange type (mm) A + Stroke L FT B + Stroke G 4-FD FZ FX With auto switch Without auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M A A B B 36 92 10 to 50 63 102 46 9 9 80 92 108 38 18 43.5 60 46 102 75, 100 43.5 106.5 10
95 91.5 113 16.2 9 80 53.5 13 7 59 4.5 118 114 140 19.5 11 L1 Rod end nut 100 53.5 13 7 71 137 136 162 6 23 12.5 Front flange type: CLQF/CDLQF FV M Front flange type (mm) A + Stroke L FT B + Stroke G 4-FD FZ FX With auto switch Without auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M A A B B 36 92 10 to 50 63 102 46 9 9 80 92 108 38 18 43.5 60 46 102 75, 100 43.5 106.5 10
6 Spring pin Carbon steel Carbon steel #1 #2 #3 Unit holding bolt Nickel plated JIS B 1354 Parallel pin Stainless steel Aluminum alloy Piston Chromated Nickel plated Rod end nut Carbon steel Lead-bronze casted Bushing For 50 or larger only 9-10-13 13 Series CLQ Dimensions: 20, 25 Basic style (Through-hole/Both ends tapped common): CLQB20/25 Extension locking LOCK M5 x 0.8 Rod side cylinder
2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads L n Formulas: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323
M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.
female thread ZS-46-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.
M10 x 1.25 M5 x 0.8 83 32 35.5 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 Rc 1/8 85 40 44 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 Rc 1/8 93 50 55 to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 Rc 1/4 109 63 69 to 1200 35 32 27 17 M10
Rc 1/8 Vent hole tap 25ALEC 18 LEC S [mm] LEC SS-T Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T U Y V LEC Y LEC Y 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 1 26.5 40 105 to 400 155.5 141 Motorless 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 118 1 34 60 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 M16
Vacuum port size Socket (Only 16) d through Hexagon width across flats 8 Width across flats L 2 x P through HA + Stroke S + Stroke Z + 2 x Stroke 4 x T counterbore Port size A Stroke range (mm) 5 to 30 A B C E F FK FL FY GA GC d D Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 M5 x 0.8 Note 2) 16.5 Note 1) 7 20 32 2 6 7 8 13 17 28 19 5 M5
STOS1EMG0 STO[AL. 63 STO] 13.
) Note 13) Note 13) Note 13) Note 13) Note 13) Name plate, caution plate for bowl, and pressure gauge in imperial units: psi, F Digital pressure switch: With unit conversion function Note 14) Note 14) Note 14) Note 14) Note 14) Note 11) For thread type: M5 and NPT.
NTH-02SUS NT-02SUS NT-03SUS NTH-04SUS NTH-05SUS M8 x 1.25 HYC-H03SUS HYC-H05SUS HYB-H020SUS 3 3.5 3.5 4 5.5 7 7 8 M6 x 1.0 3.6 5 6 7 10 10 13 17 19 24 M6 x 1.0 7 8 8 10 13 17 17 19 M4 x 0.7 9 9.5 9.5 12 15.5 19 19 24 11.5 15 19.6 21.9 27.7 M8 x 1.25 M5 x 0.8 HYB-H025SUS M5 x 0.8 M10 x 1.25 Note) The above part number is attached with 4 bolts.
mm2 < >: AC 61.5 54 0 1 M plug connector (M): VQZ212 (R)-M-C4/C6/M5 36 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 73.5 92 103.5 62 Indicator light 37.5 <42.5> < >: AC 2-7-12 13 13 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ2000 2 position double Grommet (G): VQZ2220 1(R)-G-C4/C6/M5 300 (Lead wire length) 109.2 54.5 17.3 6 6 R2.5 VQC 3.4 B
1 15-5-13 Series KP/KPG Dimensions Male Connector: KPQH, KPGH (M5) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06
x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 4.3 5.1 6.9 8.7 10.5 26 28 36 42 46 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 G1/8 G1/8 G1/4 G1/4 NPT1/8 M8 x 1.25 depth 13 NPT1/8 M8 x 1.25 depth 13 NPT1/4 M10 x 1.5 depth 15 NPT1/4 M10 x 1.5 depth 15 The position of the 4 flats of the piston rod is different from the above drawing.
SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7
13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.