XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

LEC-OM02904

13.3 . 5 13.4 . 5 13.5 . 6 13 1 13. 13 13.1 13.11

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

MLU

3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX 3.2 4.5 4.5 5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference

Series KG Stainless Steel One-touch Fittings

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 M5 0.8 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

reduces flow setting time

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 598 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Seal method Nil Without sealant S With sealant Type 2 Elbow 3 Universal Note) Face seal type is used for the G thread type. Select Nil/Without sealant.

ZX

port M5 (or M6) (PV port) Vacuum supply pressure port M5 (or M6) (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket B : For mounting spacer 13-2-44 44 Vacuum Module: Vacuum Pump System Series ZX Suction Filter Unit: ZX1-F Refer to page 13-2-12 for details.