High Purity Chemical Valve

16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46

Prevents Micro-Bubbles

54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) A B C D EH EV H J K L M O1 R S T U V Y Size W X W X 10 to 100 101 90.5 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 67.5 0.5 28 61.8 80.3 62.5 81 22.5 10 101 to 300 121 110.5 15 to 100 130.5 116 25 M5 x 0.8 20 44 45.5 M8 x 1.25 24 17 14.5 34 8 46 92 1 42 63.4 85.4 59.6 81.6 26.5 13 101 to 400 155.5 141 20 to 100 148.5 130 32 M6 x 1.0 25

MXS Series Air Slide Table

port 2-M5 X 0.8 11 3 J 10 Max.13.5 (With stroke adjuster at retraction end) I 5.5 12 6 Basic type 12 9.5 10 10 5.5 5.5 NA-M5 X 0.8 thread 5.5 deep 21 K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Compact Cylinder with Lock Series CLQ

(mm) With auto switch B Without auto switch Stroke range (mm) A Bore size (mm) BP C OA Rc NPT G D E F G H I J K L M N O OB P Q RA RB T V Z B A 10 to 50 82 36 15.6 14 63 92 46 1/8 M5 x 0.8 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 1/4 53 16 4.2 1.6 16.5 19 depth 12 depth 10.5 75, 100 92 46 10 to 50 96.5 43.5 19.6 17.5 80 106.5 53.5 1/8 1/8 21 25 98 12.5 43 M16 x 2.0 132 6 22 10

Compact Cylinder Series CQS

Model Cushion Auto switch mounting Bore size (mm) 12 16 20 25 12 16 20 25 Standard stroke (mm) Port size Lubrication Action Model Rubber Air 10-CQSXB12 10-CQSXB16 10-CQSXB20 10-CQSXB25 11-CQSXB12 11-CQSXB16 11-CQSXB20 11-CQSXB25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Non-lube Double acting single rod M5 x 0.8 5, 10, 15, 20, 25, 30 5, 10

AC Servo Motor Driver (Network card type ）

20 40 70 100 200 Bend radius [mm] 10 7 10.

CLQ

53 10 to 50 Rod end nut L1 100 63 136 11 11 117 136 154 50 12 43.5 94 136 63 75, 100 Double Clevis Style Double clevis style: CLQD/CDLQD Stroke range Without auto switch With auto switch Bore size (mm) CT 4-N Cap bolt CD CT A CL A B CL B 126 36 112 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 CD hole H10 Shaft d9 122 46 136 14 8 136 46 122 152.5 43.5 134.5 80 144.5 53.5 162.5 18

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

Compact Cylinder with Lock Series CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P = 11 L plug connector (L) Dimensions n: Stations n L 11 138 130 19 226 218 2 39 31 3 50 42 4 61 53 10 127 119 9 116 108 5 72 64 8 105 97 6 83 75 7 94 86 18 215 207 17 204 196 16 193 185 15 182 174 14 171 163 13 160 152 12 149 141 20 237 229 L1 L2 2-8-11 1 For details about certified products conforming to

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 10-SY5000 SY5000-39-16A(-Q) 10-SY7000 SY7000-39-16A(-Q) Series Assembly part no.