3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

ZR

M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 w Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 1200 LEFS40ll-1200l 1614.5 1644.5 1206 1378 18 8 1200 LC3F2 677 LEFS Series AC Servo Motor Dimensions: Motor Parallel LEFS25R With lock/LEFS25V6-B 3H9 ( ) depth 3 +0.025 0 W X (2.4) 4 x M5 x 0.8 thread depth 8.5 Encoder cable (7) Motor cable (7) 106 Z Body mounting Note 1) reference plane 50 38 3.5 3H9 ( ) depth 3 +0.025 0 45 64 (102) Stroke end of the motor side L A (Table traveling distance

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

35H9 10 26H9 86.7 71.4 56 22 158.1 130 12 5 3 7.5 32 28 18 11.5 72.9 20 (mm) J JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .07654 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .15976 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .33069 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .46096 lb

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AK, SS5YJ3 BODY PORT M5, .35714 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AK, SS5YJ3 BODY PORT M5, .59950 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT < M5, .18700 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .14219 lb. AJ.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .26455 lb. AJ.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .46541 lb. AJ.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000. VALVE. SS5YJ3 BODY PORT M5. .43058 lb. AJ.

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. 0.44092 lb. AK.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .44092 lb. AK.

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. 1.19270 lb. AK.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .20771 lb. AJ.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .11523 lb. AJ.