MHZ

40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

KR

(mm) <M5> Note) Weight (g) D L1 L2 L3 A M P Q1 Q2 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 x 0.8 12 10 11 10.4 18.5 24 26.5 30.5 29.5 32 36 25.5 27.5 16 10.4 18.5 10 30 26.5 33 29.5 4.3 4.1 4 1 8 1 4 6.0 4.1 14 21 13 M5 x 0.8 4.3 4.3 13 12.8 21 17 12.8 20.5 12 1 8 15 22 35 29.5

SMC

4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With

Table of Contents

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

Stability of suction position,

Mounting thread size 32 to 50 ZP3E-(32 to 50)UMll M10 x 1 8 to 10 ZP3E-(32 to 50)BMll 63 to 125 ZP3E-(63 to 125)UMll M16 x 1.5 13 to 15 ZP3E-(63 to 125)BMll Note 1) When mounting and removing the seal washer, rotate the set screw while the seal washer is being held.

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QA F Q QB QU QW Bore size (mm) QW QU 29 32 40 50 38 42 50 13 13 16 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 (mm) A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 P M5 x 0.8 / / / / Q 17 20 20 24.5 24.5 T

Parallel Style Air Gripper Series MHZ

MHZ26 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 M3 x 0.5 0.88 10 Max. tightening torque (Nm) Max. screw-in depth ( l mm) Applicable bolts M3 x 0.5 0.69 5 Model M4 x 0.7 2.1 8 MHZ2-6 Note) M2 x 0.4 0.15 4.5 M5 x 0.8 4.3 10 Attachment MHZ2-10 M3 x 0.5 0.88 6 M6 x 1 7.3 12 MHZ2-16 M4 x 0.7 2.1 8 M6 x 1 7.9 13 MHZ2-20 M5 x 0.8 4.3 10 M8 x 1.25 17.7 16 MHZ2-25 M6 x 1 7.3 12 MHZ2-32 M6 x

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

" One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" L3 28.8 (L4) U side D side L5 18.4 4 x 5.3 (For mounting) (5.3) (4.9) 8 B B B B B 115.5 5.5 109.4 102.9 97.5 M3 Terminal screw 35 A A A A A 13 64 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

CXS

depth 12 4-M5 x 0.8 with depth 4.5 4-Rc 1/8 with depth 6.5 4-Rc 1/8 with depth 6.5 8-M4 x 0.7 with depth 5.5 8-M5 x 0.8 with depth 7.5 8-M5 x 0.8 with depth 7.5 M6 x 1.0 7.75 12.5 45 9.5 6.5 8 M6 x 1.0 x 12 M8 x 1.25 x 6 CXS20 M6 x 1.0 8.5 15 46 13 9 9 M6 x 1.0 x 14 M8 x 1.25 x 6 CXS25 M8 x 1.25 9 19 56 20 11.5 10 M8 x 1.25 x 16 M10 x 1.5 x 8 CXS32 Strokes Symbol SS Z ZZ Stroke 10, 15, 20

KJ

15 13 15 25 24 30 46 40 48 68 85 2.3 2.5 2.3 2.8 3.5 2.3 12.7 15.5 11 14.5 11 14.5 14.5 12 14.5 19 15.5 18.5 20.5 19.5 20.5 21.5 24.5 18.5 26.5 18.5 26.5 26.5 24 26.5 32.5 28.5 31.5 36.5 35.5 36.5 36 39 9.8 13.4 9.8 13.4 13.4 17.2 21.5 20.5 22 23 8 1 8 1 8 10-32 UNF 5 32 8 10.4 16 1 8 Applicable tubing 3 16 1 8 8 11.4 16.5 M5 x 0.8 10-32 UNF 13.4 24 1 8 8 13.2 17 1 4 4.6 1 4 15.3

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 12 5 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 14 6 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 16 8 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

CRB2/CRBU2/CRB1

0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 0.004 0.012 0 0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 0.004 0.012 0 0.043 14 6 17 34.5 M4 x 0.7 0.5 42 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 12 13 0.005 0.014 0 0.043 16 8 1 17.5 4.5 47.5 M5 x 0.8 50 13 22 2 8 12 43 5.5 M5 x

21

30 D 8 E 20 F 13 FD 7 FL 10.5 FT 4 FX 60 FY FZ 75 G 6 H 31 H1 5 H2 8 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 17.5 15 40 17 32 37 10 26 13 7 10.5 4 60 75 6 34 6 8 17.5 15 40 17 32 37 12 26 13 7 10.5 4 60 75 8 34 6 8 23.5 20.5 52 22 41 47.3 14 32 16 7 13.5 5 66 36 82 8 42 8 10 I 27.9 KA MM M8 x 1.25 NA 24 NN M20 x 1.5 P M5 x 0.8 S 55 Z 90 ZZ 99 Bore size 20 25 32 40 Width across

Stainless Steel 316 Fittings

(inch) L Model 1/8" (3.18) KFG2N-01 7.8 8 1.9 H 5/32" (4) KFG2N-03 7.7 8 1.9 1/4" (6.35) KFG2N-07 9 12 4.6 5/16" (8) KFG2N-09 10.1 14 6.7 L 3/8" (9.53) KFG2N-11 11.7 17 10.7 1/2" (12.7) KFG2N-13 12.8 19 13 24 Series KFG2 Specific Product Precautions 1 Be sure to read before handling.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch