ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Compact Manifold Regulator

size Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Size 6 8 10 1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil X17 Symbol Nil X17 VBA VBAT AP100 Straight type Straight type Elbow type Elbow type 6.5 X X 12.5 X X Y Y X X Y X X Y Fitting size Fitting size Fitting size Fitting size 5 5 5.5 5 6 4, 5/32 4, 5/32 6 3

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

4 Port Solenoid Valve Series VQD1000

16 17 9 Approx. 4 10 P=11 10 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 20 237 229 19 226 218 17 204 196 15 182 174 13 160 152 11 138 130 9 116 108 7 94 86 6 83

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

Proposals for Energy Saving

40 50 63 80 100 30.5 (40.5) 40.5 36 (46) 46 43.5 (53.5) 53.5 53 (63) 63 Bore size (mm) L1 O N Q Th9 L G1 4.5 5 6.5 7 8 8 10 12 19 (20.5) 21 20.5 Note 3) 9.5 10 12 17 18 18 20 22 5 5 5 5 5 20 25 32 40 50 63 80 100 9 depth 7 9 depth 7 9 depth 7 9 depth 7 11 depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 28 35

Table of Contents

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

ZR

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

CRB2/CRBU2/CRB1

Refer to pages 31 and 32 for detailed description of Made to Order.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

VZ3000

(M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed Center/Exhaust

Manifold Specifications

One-touch fitting type) VFN n: Stations L Stations 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 16 291 300 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

123 162.5 139 17 187.5 171 237.5 219 12.5 13.5 11.5 14.5 12.5 Stations L1 L2 L3 L4 13 14 15 16 11 298 12 323 348 373 310.5 300 283 360.5 350 331 287.5 267 312.5 299 12 337.5 315 362.5 347 13 15.5 13.5 16.5 14.5 49 5 Port Solenoid Valve Series SY3000/5000 Stations SS5Y5-45GDUC4 C6 C8 C4 C6 C8 C4 C6 C8 Note) L1 to L4 dimensions of SS5Y5-45GDStations Dare the same as SS5Y5-45GDStations U.

Digital Flow Switch (Integrated display type)

PF2M701 (1 L/min) PF2M702 (2 L/min) PF2M705 (5 L/min) PF2M710 (10 L/min) -97No.PF-OMW0007-E PF2M725 (25 L/min) PF2M750 (50 L/min) PF2M711 (100 L/min) PF2M721 (200 L/min) -98No.PF-OMW0007-E Dimensions PF2M7#-C4/C6/C8/N7(-L) (mm) Model A P PF2M701/702/705/710-C4(-L) 59.1 2.8 depth 8.4 PF2M701/702/705/710/725/750-C6(-L) 59.9 2.8 depth 8.4 PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(