3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Applicable tube O.D.

Vacuum Pad: Ball Joint Type

Q Applicable tubing O.D.

CE2

BT-08 63 CC 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05 BA-06 BA-08 BA-10 Foot style 2.37 3.61 5.63 9.33 13.08 -X Flange style 2.55 3.84 6.08 10.11 14.01 Basic weight

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

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F|drinser rype Fighr angle lhgd q! ffiffi Key connection is ideal tor impact resistance.

LVQ

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 5.5 to 6.0 17-5-66 5 Series LVQ Integral Fitting Type (Hyper Fittings) Construction Double acting type N.O. type Basic type N.C. type PB PB q q q VC PA PA VDW e e e VQ VX2 A B A B SMC SMC VX A A B A B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

When ordering TUV approved products, add " Q" at the end of the standard part number.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

MB

3 q u @9 #0 #2e y!6#1@8t!2w#3!5 !7 !8 !9 @0 @1 @6 @7 i o 80, 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 !0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

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fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ? Series VQC1 000 : Base-Mou nted Type/Pl u g-in Un it Q How to order manifolds refl e I I Kit Kit Bequires ror S kit SDO,'. Fill out for UO serial kit only.

Return Filter FH100 Series

Precautions FH100-06 to 24: Nominal filtration 10 m q Mounting Confirm IN and OUT before mounting.

RB/RBL/RBQ

/Cap (Resin part only) RBC C 08 Applicable model 08 10 14 20 27 RBC2015 RBC2725 RBC0805, 0806 RBC1006, 1007 RBC1411, 1412 Cap Cap cannot be mounted for basic type. Please place an order with cap type from the beginning.

AS-FPQ/AS-FPG

3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Speed Controller with One-touch Fittings

2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !