4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

Table of Contents

-FPGDouble Check block P R PR VQ0 4 -Block valve 1 2 0 1 P R PR Blocking indication label Cylinder parts C4: With One-touch fitting for 4 C4 (SUP) port One-touch fitting for 4 VV5Q04-08FU2-D Manifold base (8 stations) VV5Q04-08FU2-D 1 set (F kit 8 station manifold base no.)

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

VQZ1000/2000/3000

) 38 U side D side Stations 1 2 3 n (43) 2.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n

Series VQ Metal Seal/Rubber Seal Body Ported

Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQ VV5QZ25C C C4 05 D VQ4 CE compliant Series 2 VQZ2000 VQ5 Option Nil Q CE marked Port size [4(A), 2(B) port] C3 C4 C6 01 Nil None DIN rail mounting (With standard DIN rail length) VQC 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting Rc 1/8 Compact body D Stations 02 VQZ Manifold type 5 Base mounted DIN rail mounting (Without DIN rail) 2 stations D0 Note) Note 1) The one-touch

VZ3000

) (Piping port) L plug connector (L) VZ3220-L-M5 M plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid

CATALOG

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

0.4

Side, Top C8 C3,C4,C6,M5 12 stations (24 as a semi-standard) SQ1000 D-sub Connector (25 Pins) U side D side Cable Assembly AXT100-DS25015 030 050 The D-sub connector cable assemblies can be ordered with manifolds. Refer to How to Order Manifold. 1 2 3 stations D-sub Connector Cable Assembly Terminal No. Valves are numbered from the D side.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Silencer AN103-X233 VVQ1000-F7-L C3 C4 C6 Example Double (latching) solenoid (24 VDC) VQ2170-5MOD-C6 (4 sets) Single solenoid (24 VDC) VQ1170-5MO-C6 (4 sets) C6 (EXH) port One-touch fitting for 6 Cylinder port C6: Witn One-touch fitting for 6 Block bushing assembly (4 pcs. attached) U side D side 3 m 1 2 3 Stations D side U side D-sub connector cable F kit (D-sub connector) Manifold base

VQC

The D-side of the EXH block in the EXH passage is blocked. Note 2) When using port plugs, circle ports to specify. Notes C3 C4 C6 C3 C4 C6 Note 3) When mounting an elbow fitting assembly (VVQ1000-F-L), indicate "L " in the table above.

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 P N 1 2 D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

5 Port Solenoid Valve SY Series

, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7 105.8 86 [88.2

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

M5 F Option None IN side port side OUT side port side DIN rail mounting (for manifold) With bracket With name plate D M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 F N Drop prevention Stop in the middle Note) When specifying more than one option, combine symbols in alphabetically.