E-MY2B_E_A

Options Controller mount bracket L type bracket MYE-LB Hexagon socket head screw M5 x 8 (2) DIN rail bracket MYE-DB Cross recessed panhead screw M3 x 6.5 (2) Clamp screw M4 x 10 (1) Bracket Cross recessed panhead screw Hexagon socket head screw Clamp screw Bracket L type bracket (MYE-LB) DIN rail bracket (MYE-DB) 5 Names and Functions of Individual Parts Controller integrated type General

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Fluid /cm2) position Free lm gact/vibration resistance 1sc,i 5G (45 100OHz) Enclosure Dust Solenoid Specifications Options crommet (G) (H) Plug connector(L) (M) 0rr170-3418 NVz1120 4 For R port of valve body NAN120-M5 Noise reduction: 18 dB or more 1 1 Ov 6a/Bo Hz, 220V 5o/ao Hz . . . : t t i t i v1ry?

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

The 5 port solenoid valves series SQ was designed for applications which demand high speed, high frequency, long life and a precise response time. The SQ uses cassette style valves and manifolds, making it simple to increase or decrease the number of stations on a DIN rail.  Valves are available with 12VDC or 24VDC rated voltage.  Actuation options include 5 port single solenoid, 5 port

HRX-OM-Z002

HRLE090-W-Approx. 20 Installation environment specifications Sound noise HRLE050-A-2062/64 dB(A) HRLE050-W-2062/64 dB(A) HRLE090-A-2065 dB(A) HRLE090-A-4067 dB(A) HRLE090-W-20/4065 dB(A) * 1 m from the front surface, 1 m high from the floor, rated condition. 3.2 Installation HRLE Series 3-6 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.2.3 Installation and maintenance space It is recommended

Table of Contents

Special resin Carbon steel Description No. q w e r t y u i o !

Table of Contents

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

3 q u !0 !2 r y e !5 o !

Mechanically Jointed Rodless Cylinder Series MY1

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

The controller is sold as single unit after the compatible actuator is set. q Check the actuator label for model number. This matches the controller. q * Refer to the operation manual for using the products.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min) max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

33

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 Thermo-chiller Q x t: Heat capacity [kJ] 15 x 860 1120 [W] 20C Water bath Cooling capacity = Considering a safety factor

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

ITV

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Free Mount Cylinder Series CU

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.