Stations: 6 Stations

Stations: 6 Stations, Option: S (Built-in Silencer, Direct Exhaust)

Stations: 13 Stations, Option: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations

Stations: 12 Stations, Manifold Type: FD2 (D-sub Connector 25 Pin 3.0m), Option: RS (External Pilot, Silencer)

Stations: 6 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Option: NS (Name Plate, Silencer)

Stations: 3 Stations, Manifold Type: FD2 (D-sub Connector 25 Pin 3.0m)

Stations: 4 Stations, Manifold Type: FD3 (D-sub Connector 25 Pin 5.0m)

Stations: 8 Stations, Manifold Type: FD3 (D-sub Connector 25 Pin 5.0m)

Stations: 11 Stations, Manifold Type: FD2 (D-sub Connector 25 Pin 3.0m)

Stations: 11 Stations, Manifold Type: FD3 (D-sub Connector 25 Pin 5.0m), Option: NS (Name Plate, Silencer)

Stations: 5 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable)

Stations: 10 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable)

Table of Contents

(LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S CEP1 Low profile, non-coupling type with reduced height and length CE1 Compact Electric Actuator Series LG1 CE2 Series with coupling available Mounting of a non-standard motor is possible.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K X [mm] LEYGlM (Sliding bearing) [mm] LEYGlL (Ball bushing bearing) Size Stroke range (mm) L DB Size Stroke range [mm] L DB (0.5) Section XX 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 25 15 to 110 91 10 115 to 190 115 195 to 300 133 Z WB WA WC + Stroke 32 20 to 55 74 16 60 to 185 107 190 to 300

15

Size Stroke range [mm] L DB Size Stroke range [mm] L DB 25 Up to 110 91 10 115 to 190 115 195 to 300 133 25 Up to 55 67.5 12 60 to 185 100.5 190 to 300 138 32 Up to 110 97.5 13 115 to 190 116.5 195 to 300 134 32 Up to 55 74 16 60 to 185 107 190 to 300 144 LEYGlM, LEYGlL Common [mm] Size Stroke range [mm] B C DA EA EB EH EV EC ED G GA H J K M NA NB Up to 35 89.5 50 20 46 85 103 52.3 11 12.5

HRX-OM-S004

480VAC(60Hz) Allowable voltage fluctuation +4%, -10% (Maximum voltage less than 500VAC and no continuous voltage fluctuation Rated current A 20 Earth leakage Electric system breaker (Standard) Sensitivity mA 30 Rated operating current 50/60Hz 5 A 6.9 / 7.5 8.1 / 9.6 Rated power consumption 50/60Hz5 kW (kVA) 3.7 / 4.7 4.8 / 6.1 (4.7 / 5.3) (5.7 / 6.6) Sound level (Front 1m / Height 1m)5 dB

JXCx-OMT0005CN

/100 ft@125 kHz(max.) 0.25 db/100 ft@500 kHz(max.) 0.36 db/100 ft@1 MHz(max.) 0.29 db/100 ft@125 kHz(max.) 0.50 db/100 ft@500 kHz(max.) 0.70 db/100 ft@1 MHz(max.) 6.9 /1000 ft(max.) 3.6 /1000 ft(max.) 28 /1000 ft(max.) 17.5 /1000 ft(max.) 3 DeviceNet 2 CAN_H-CAN_L1211%1/4W 30 - 8LED 8.1 LED LED LED PWR ALM MS DeviceNet NS DeviceNet DeviceNet DeviceNet 8.2 LED LED LED PWR

V100

Note VZ2000-37A-2 For VZ22 AN120-M5 Noise reduction: 18 dB or more (8 x 17l ) AN110-01 Noise reduction: 21 dB or more (13 x 38l ) Description M5 R 1/8 (2) Silencer Note 1) For body ported type Note 2) For sub-plate mounted type 4-15-1 2 Series VZ200 How to Order Option M5 1 2 VZ2 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Series VZ200 Only body ported type Type of actuation

VFS

Valve exhaust noise dampening: 35 dB or more. Collection rate of drainage and oil mist: 99.9% or more. Piping work is reduced.