SY

K T Link Mini SI unit mounting position Mounting position Applicable stations Symbol U Q DeviceNet U side D side Both sides 2 to 10 stations R1 CompoBus/S (16 outputs) Symbol Mounting position U U side D B M R2 CompoBus/S (8 outputs) 2 to 16 stations U JEMANET V CC-Link Special specifications D D side For special specifications, indicate in the station table below. 2 Valve Type ( ) Maximum

smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

Rotary Actuator/Vane Type

D-M9m m: Operating range Size q m: Operating range q d: Hysteresis range 10, 15 170 20 20, 30 100 15 40 86 10 Actuated position: ON Auto switch d: Hysteresis range OFF D-S/T99(V)m, S9P(V), S/T79, S7P, D-97/93A, 90/90A, R73/80m (OFF) Magnet Size q m: Operating range q d: Hysteresis range 10, 15 110 10 20, 30 90 40 52 8 Note) Since the figures in the above table are provided as a guideline

ZP

C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y

Air Cylinder Series CM2

Auto switch model Bore size (mm) 25 20 32 40 D-A9 D-M9 D-M9W q BM2-020 (1) w BJ3-1 q BM2-025 (1) w BJ3-1 q BM2-032 (1) w BJ3-1 q BM2-040 (1) w BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7BAL D-H7NF BM2-025 BM2-020 BM2-032 BM2-040 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-025 BA2-020 BA2-032 BA2-040 D-A3A/A44A D-G39A/K39A BM3-025 BM3-020 BM3-032 BM3-040 Note 1) Two kinds of auto switch mounting brackets

0.4

D0 D Note 5) Series CE compliant VQ2000 2 CE compliant Nil Q Manifold Plug-in unit 1 DC specification only Stations Kit type Cylinder port K Note 3) N R Note 4) S Special wiring spec.

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Modular F.R.L. Units

F G H SUP. 3 1 2 q Body size Description Symbol C D E 20 30 40 Key can be mounted when residual pressure is released.

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

ZP

D. Applicable tube O. D.

Stability of suction position,

D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6 110.6 ZP3E-Y32UMlJB30 91.6 135.6 ZP3E-Y32UMlJB50 111.6 155.6 Model A B ZP3E-Y40UMlJB10 66.6 110.6 ZP3E-Y40UMlJB30 91.6 135.6 ZP3E-Y40UMlJB50 111.6 155.6 Model

New

type VXF24A<<< Grommet Grommet (with surge voltage suppressor) A B A B C D C D K J K J I Q z 300 1/4 Exhaust port I Q z 300 1/4 Exhaust port R 12.5 S R 12.5 S L L H E U H E U F F G 2 x P 2 x P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4 Exhaust port (44) U F G1/2 E H L G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Combination example q Air combination AC20B-02E-D 1 pc. Spacer with bracket Y200T-D 1 pc. Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

7

Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5) 98 (106) 98 (106) 104 (112) 168 (176)

NCQ8

Q J E D-rod Dia.

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Magnetically Coupled Rodless Cylinder

in Area C in the case of 15. 25, 32, 40, 50, 63 (mm) Auto switch model A B C D D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 Bore size (mm) 25 32 40 50 63 18 21.5 23.5 27.5 29.5 99 108.5 124.5 148.5 158.5 43 46.5 48.5 52.5 54.5 74 83.5 99.5 123.5 133.5 23 26.5