5 Port Solenoid Valve Series VQZ1000/2000/3000

port) (External pilot only) 11.5 11.5 1/8 [1(P), 5(EA), 3(EB) port] 19 38 L-type plug connector (L) M-type plug connector (M) 58.4 [60.6] Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) 84.2 [86.4] 48.6 [55.6] 43.6 EA EB EA EB P P Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC Unless otherwise indicated, dimensions are the same as Grommet (G). [

NCQ2/CQ2

Rod Axial Piping Water Resistant End Lock Clean Series Copper/Fluorine free series Construction and Parts Bore size (mm) 12 16 20 25 32 40 50 63 80 100 100 Standard/ Allowable kinetic energy: Ea 0.022 0.038 0.055 0.09 0.15 0.26 0.46 0.77 1.36 2.27 100 50 40 30 Allowable lateral load at rod end W (N) Allowable lateral load at rod end W (N) 80 With rubber bumper/ Allowable kinetic energy: Eb

Air Pilot Operated Series NVSA

A common Pressure Gallsry (P) and two common Exheusl Gall6rle3 (EA & EB) Interconnect wlth lha p(seur6 and Bxhausl ports of all ihs valve wlthin the a$smbly. Prg38ur6 and Exhausi sMca connectlona ar locatod at eithor 6od of the manlfold.

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

JXCx-OMX0009

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 109 - Caution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EB EB EB EC EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Nil Nil Nil Nil Name plate and pressure gauge in imperial unit : MPa e Pressure unit Note2) Z Z

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 75 - Cution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EB EB EB NPN open collector 1 output + Analog voltage output EC EC EC EC NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2

VQ4000

) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detail dimensions of each option.

Table of Contents

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Multistage Ejector Series ZL112/212 1

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

        Series VKF300

( , 0( , = ) % $ B /EB3A /EB '!' B /EBA /EB '' B /EBA /EB '' B /EB3A /EB '' i D 3 B /EB A /EB '4' % *% o ?%) , < Series VKF300 $ "# $ %& ! %& ! ! "# $ %& ' ( &) $%% / / 01 * & * * & ) # ! %& !+ & ,,& &-% + &) ,.. ! "# ! * & ) $%% / / 01 * & * ' ( &) !+ & ,,& &-% + &) ,.. ! " # $ # ! %& Series VKF300 * ( / 73 * "" ()*+ "" ,&30 ! // 44 44 $ %& ' !"

VS7-6

Note) Symbol EA and EB correspond to R1 and R2 respectively (R1=EA, R2=EB) 1.19-18 VS7-8 Interface Speed Control/Dimensions AXT510-32A Interface Speed Control SV SY SYJ Symbol SX VK Interface Regulator/Dimensions VZ P port regulation/ARB350-00-P Interface Regulator VF VFR VP7 VQC SQ VQ VQ4 Symbol VQ5 A port regulation/ARB350-00-A B port regulation/ARB350-00-B VQZ VQD P port regulation VFS

Combination Cylinder

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1 BX BY BP C D EA EB F GA GB GC H1 J K KA LH FA LD With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20

Fieldbus System

Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) QAN QA QBN QB NAN NA NBN NB NCN NC NDN ND VAN VA VBN VB DAN DA DBN DB FAN FA FBN FB EAN EA EBN EB

5 Port Solenoid Valve

When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids. w SI unit specifications 16 02 16 stations 2 stations Number of outputs Symbol Communication connector Protocol Specified layout Note 2) (Available up to 32 solenoids) 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB Without SI unit 24 24 stations 32 16 32 16 32 16 32 16

Electric Actuator

Support Block Model LEYG S 016 Size 016 025 032 For size 16 For size 25 For size 32 Support block Support block Body mounting bolts EB X 2 x OA thread effective depth OB 2 x G through ST (0.5) GA WC + Stroke Caution Do not install the body using only a support block. The support block should be used only for support.

Mechanically Jointed Rodless Cylinders

Eb Zb1 JJ H Eb Eb P A2 A1 L (Counterbore depth) L (Counterbore depth) 2 x 2 x LD Detail drawing of Zb2 (Adjustable range) Detail drawing of Zb1 (Adjustable range) 2 x 2 x LD MY3 Floating Bracket Mounting Dimensions (mm) Applicable cylinder Model Common JJ L P LD H G 1 1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332