CY1

Nickel plated Chrome molybdenum steel Hexagon socket head screw 21 Aluminum alloy Switch mounting rail 22 Note) Brass for 6, 10, 15 28 Series CY1S Magnetic Rodless Cylinder Slider Type/Slide Bearing Dimensions Slider type/Slide bearing CY1S6, 10 (mm) FB FA d EA EB G GP H HB HG HP A HS HT HA D B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

VFRA3000

: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

Direct Solenoid

Normally this manilold arangeme is usd for Single prossurQ four way vaMs circuilry where pres$re is applied to the (P) common gallery and exhausts through th dual (EA & EB) common galleris.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Electrical entry 2(B) 4(A) Symbol Electrical entry L-type plug connector B Note 2) 5(EA) 3(EB) 1(P) L 4-position dual 3 port valves (N.C./N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Lead wire length 300 mm Symbol 3 6 10 15 20 30 100 Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

length (mm) 300 500 1000 2000 5000 Symbol W1 W2 W3 W4 W7 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 2-4-219 Series VQ Dimensions 2 position single: VQ015 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 25 18 10.5 A A B B ~ = EB EB P EA EA EB P EA 23.4 mounting holes 31 38 Lead wire length = 300 76<81> M plug connector 69.5<74.5> L plug connector 51 (L plug connector) 45 (M plug connector) 13.5 9.9

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

) P. 1 + SYJ5000 Body ported Base mounted 0.47 4/2 5/3 (A/B EA/EB) With light/ surge voltage suppressor L plug connector { } P. 23 + SYJ7000 2 Position Single 2.4 4/2 5/3 (A/B EA/EB) Double { } M plug connector + For AC P. 47 Non-locking push type SYJ3000 3 Position 100 VAC / Hz 110 VAC / Hz 200 VAC / Hz 220 VAC / Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { }

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x

CL

SMC if the fine lock-up unit must be disassembled. 3.1-54 Lock-up Cylinder/Double Acting Single Rod Series CL1 Basic/(B) A Lock-up at piston forward B Lock-up at piston backward 40 to 100 With rod boot CL MLGC CNA CB CV/MVG CXW 125 to 160 CXS CXT With rod boot MX MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 BY C EA K D BX J KA BP EB

VQ7-6/7-8

63 PE PE PA B 80.5 (50) 63 P PE PE P R1 R2 R1 R2 EA EB EB EA A A Dimensions inside ( ) are for sub plate apertures Rc3/8 and 1/2 Dimensions inside are for sub plate aperture Rc3/4 Dimensions inside ( ) are for sub plate apertures Rc3/8 and 1/2 Dimensions inside are for sub plate aperture Rc3/4 28 Series VQ7-8 Manifold Options Individual EXH spacer VV72-R-03, 04 Individual SUP spacer VV72

Air Pilot Operated

A common Pressure Gallsry (P) and two common Exheusl Gall6rle3 (EA & EB) Interconnect wlth lha p(seur6 and Bxhausl ports of all ihs valve wlthin the a$smbly. Prg38ur6 and Exhausi sMca connectlona ar locatod at eithor 6od of the manlfold.

7.4

Manifold Flow Rate Characteristics Port size Flow rate characteristics 1R4/2 (PRA/B) 4/2R5/3 (A/BREA/EB) Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] Cv C [dm3/(sbar)] Cv SS0752-C 1/8 C4 2.6 0.71 2.7 0.75 SS0755-CC 1/8 C4 2.1 0.58 1.9 0.53 SS0755-VC M5 thread V4 0.86 0.24 0.86 0.24 When 5-station single solenoids are operated simultaneously. 740 Valve Specifications S0700 Series

5 Port Solenoid Valve Series VQZ1000/2000/3000

port) (External pilot only) 11.5 11.5 1/8 [1(P), 5(EA), 3(EB) port] 19 38 L-type plug connector (L) M-type plug connector (M) 58.4 [60.6] Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) 84.2 [86.4] 48.6 [55.6] 43.6 EA EB EA EB P P Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC Unless otherwise indicated, dimensions are the same as Grommet (G). [

NCQ2/CQ2

Rod Axial Piping Water Resistant End Lock Clean Series Copper/Fluorine free series Construction and Parts Bore size (mm) 12 16 20 25 32 40 50 63 80 100 100 Standard/ Allowable kinetic energy: Ea 0.022 0.038 0.055 0.09 0.15 0.26 0.46 0.77 1.36 2.27 100 50 40 30 Allowable lateral load at rod end W (N) Allowable lateral load at rod end W (N) 80 With rubber bumper/ Allowable kinetic energy: Eb

Air Pilot Operated Series NVSA

A common Pressure Gallsry (P) and two common Exheusl Gall6rle3 (EA & EB) Interconnect wlth lha p(seur6 and Bxhausl ports of all ihs valve wlthin the a$smbly. Prg38ur6 and Exhausi sMca connectlona ar locatod at eithor 6od of the manlfold.

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

JXCx-OMX0009

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 109 - Caution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EB EB EB EC EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Nil Nil Nil Nil Name plate and pressure gauge in imperial unit : MPa e Pressure unit Note2) Z Z