Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 20 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

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Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

Gun Type Ionizer

Gun Type Ionizer IZG10 Series IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment *1 Lightweight 200 g Only *1 Body weight Lighting LED Reduced operating force Easy to hold grip Blow setting function p. 179 Select from continuous blow or pulse blow.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

Free Mount Cylinder

25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 With auto switch S Without auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 56 62 66 65 73 79 10 st 66 72 76 75 83 89 15 st 76 87 91 90 98 104 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

Smooth Cylinder/Low Speed Cylinder

41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5 112.5 61.5 61 104 121 112 121 55.5 56 57.5 57.5 57.5 55.5 66 58.5 Note 2) D-A9/A9V types cannot be mounted on 50. 1224 Auto Switch Mounting Series CA2Y Minimum Auto Switch Mounting

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Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).

Made to Order

x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5 7.5 7.5 74.5 28 90 39

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x 0.93 x 1 x 0.88) = 0.51 m3/min 3 Selecting a model According to the corrected air flow capacity of 0.43 m3/min, IDF4E will be selected which air flow capacity is 0.52 m3/min at 50 Hz.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

22 2 Position single Body ported type 5 Port base mounted type (With sub-plate) SYJA3220-M3 25 2 Position double 0.9 (0.05) SYJA3320-M3 M3 0.5 M3 0.5 3 Position closed center SYJA3420-M3 28 3 Position exhaust center SYJA3520-M3 3 Position pressure center SYJA3140-M5 48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position

MY1

max. m1 max. m3 max. 2.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 Port Base Mounted (For manifold base only) 2 position 1/8 M5 x 0.8 56 66 58 3 position Note 1) Dedicated for manifold base.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

63 37 55 2 position SZ 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 SY 36 53 41 63 37 55 Note 1) 4 Port Base Mounted (For manifold base only) 2 position SYJ 1/8 M5 x 0.8 56 66 58 3 position SX Note 1) Dedicated for manifold base.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

CY1

9.5 34 15 7.5 3.5 M3 x 0.5 10 26 23 CY1R10 7 5 3.3 13 6.5 7 11.5 3.4 15 7.5 M3 M3 x 0.5 12 38 3.5 33 30 CY1R15 6.5 4.5 4.4 14.5 18 4.5 8 7.5 8.5 M4 14 17 M4 x 0.7 38.5 35.5 53 4.5 CY1R20 6 6.5 4 M3 3 16.5 14.5 26 45 14 62 29 7 4.5 M4 x 0.7 34 CY1R25 7 8 4 M4 3 20.5 70 29 14.5 5.5 M5 x 0.8 39 31 51 17 8 CY1R32 7.5 9.5 4.5 21 34 17 M5 M6 x 1 50 41 3 76 6.5 62.5 22 10 CY1R40

ZX

(Pilot port for supply valve) 1 51 41 Filter unit (F) M3 x 0.5 (Pilot port for release valve) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 19 7.6 1 10 13.6 Vacuum switch Supply valve N.O.