10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
Rate) Seal material Leakage rate Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Note) Non-leak, Medium vacuum 106 Pam3/sec or less Power source Air Nil, G V, M 10 Note) to 60 10 Note) to 40 1 cm3/min or less NBR, FKM 10 Note) to 80 10 Note) to 60 20 to 60 20 to 40 AC DC Note) Value on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C
VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C
45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C
10C)2.5(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)3.4(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)3.4(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 5 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 9 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 18 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 20 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 13 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 16 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 12 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 8 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 6 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 14 Stations
Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 15 Stations