SMC Pneumatic Clean Series Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g
Port location on head cover 10, 16 Nil R Perpendicular to axis Axial direction Built-in Magnet Cylinder Model Suffix the symbol -A (Rail mounting style) or -B (Band mounting style) to the end of part number for cylinder with auto switch. For configuration, refer to page 10-3-7.
L[]ZC[]3L[][][]A3 L[]ZC[]3M[][][]A3 L[]ZC[]3H[][][]A3 L[]ZC[]5HRated thrust (N) 196 or m ore 117 or m ore 72 or m ore Rated thrust (N) 80 or m ore 43 or m ore 24 or m ore Available stroke (mm) 1 200 (Std. stroke : 25/40/50/100/200 Available stroke (mm) 1 200 (Std. stroke : 25/40/50/100/200 [][][]A5 Feed screw lead (mm) 2 6 12 Feed screw lead (mm) 2 6 12 L[]ZC[]5MMounting direction Horizontal
Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.
Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 Switch the mode between manual and auto. Mode switch Step Motor (Servo/24 VDC) !3 !4 Stop position, the value set by i and alarm information are displayed. 7-segment LED SET Decide the settings or drive operation in manual mode.
J K Nil N R H Nil Z Nylon tarpaulin Neoprene cross With cushion on both ends Without cushion With on rod end bumper With on head end cushion With connector Without connector Rod boot Cushion Connector Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
J K Nil N R H Nil Z Nylon tarpaulin Neoprene cross With cushion on both ends Without cushion With on rod end bumper With on head end cushion With connector Without connector Rod boot Cushion Connector Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
In this document TM and (R) are not specified. -EtherCAT is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. -83No.
In this document TM and (R) are not specified. -EtherNet/IPTM is registered trademark and patented technology, licensed by PROFIBUS and PROFINET International. -86No.
In this document TM and (R) are not specified. -PROFINET is registered trademark and patented technology, licensed by ODVA. -88No.
2 1 5.7 15 16 L 11 30.7 11.4 [820m] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* B 15m* Shield Vcc B-4 12 C 20m* GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 2 1 14 18 5.5 6.3 B1 A1 17.7 5 6 14.2 10.2 A6 B6 B1 A1 B3 A3 2 1 5.7 16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.
R The pressure range in which the Pressure switch meets the specifications. Values outside of this range can be set if they are within the set pressure range, but cannot be guaranteed to meet the product specifications. Rated pressure range The value currently displayed.
2 r w e !0 o !9 !8 i !5 u !7 q !
Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)
Speed Rated speed 0 r/min Time [Pr. PC01] setting (0 mm/s) [Pr. PC02] setting For example for the servo motor of 3000 r/min rated speed, set 3000 (3 s) to increase the speed from 0 r/min to 1000 r/min in 1 second.