Compact Hydraulic Cylinder

80 60 22.4 30 17 17 M10 x 1.5 22 12 25 M18 x 1.5 30 80 80 26 65 13 65 212 12 75 115 M12 x 1.75 32 8 100 100 75 28 32 22 20 26 14 29 M22 x 1.5 35 90 100 34 80 13 80 234 14 90 139 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 27 19 27 14 34 35 100 125 34 80 15 100 250 16 112 170 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load weight kg Load weight kg Load weight kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16 MY2HT16 MY2HT16 3 3 3 2 2 2 1 100 200 300 400500 1000 1500

MY2

1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load weight kg Load weight kg Load weight kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16 MY2HT16 MY2HT16 3 3 3 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

4/5 Port Air Operated Valve Series SYJA3000

connector (WO) 106.5 99 57.6 73 [80] 87.7 M8 x 1 77.5 0.8 0.8 60 0.8 127.2 [131.6] 0.8 0.8 0.8 95.1 [97.3] 85.3 [87.5] 105.1 104.2 94.2 107.6 [112] 86.8 141.8 [146.2] 122.2 [126.6] 145.4 147.2 125.4 110.6 161.8 125.2 Max. 10 160 140 84.1 [91.1] Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Pg7 Refer to page 1-5-79 for dimentions with connector

Mechanically Jointed Rodless Cylinder Series MY2

MY2HT25 20 MY3A MY3B MY2HT16 10 10 10 MY3M MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load mass kg 10 10 10 MY2HT25 MY2HT25

REA/REB

200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

] 57.6 73 [80] 57.6 A A A A 41 9.4 28.9 41 28.9 9.4 B B B B (Pitch) 7 24 P = 19 (A, B port) 1/4 (Pitch) 7 24 P = 19 Applicable tubing O.D.: 10, 3/8" (A, B port) One-touch fitting L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 107.5 Max. 10 73 [80] 88.7 100 Pg7 57.6 77.5 60 M8 x 1 84.1 [91.1] (Lead

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

CKG1 CLK2G MDB CDA2 MDNB CDNA 80 to 125 63 to 100 80 to 100 63 to 100 MDB CDA2 MDNB CDNA Air cylinder Air cylinder Air cylinder with lock Air cylinder with lock How to Mount and Move the Auto Switch 1.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

stroke end) and its mounting height Operating range Auto switch mounting brackets/Part no. 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Note 1) Intermediate strokes not listed above are produced upon receipt of order.

Ionizer

(High pressure warning label position at 300 mm length) 19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

3 Port Air Operated Valve Series SYJA300

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Sine Rodless Cylinder Series REA/REB

Lo (cm) CY 40 32 CX 500 400 300 200 100 80 300 MQ REAR40 50 40 30 200 REAR32 100 Allowable driving force Fn (N) RHC Allowable driving force Fn (N) 100 REAR25 20 20 30 40 50 Load mass W (kg) 20 30 40 50 RZQ REAR20 10 REAR15 Usable range Usable range 10 10 REAR10 D5 5 -X 1 1 0 1 2 3 4 5 6 1 Individual -X 0.5 100 200 300 7 8 9 10 1 112 13 1415 0 1 2

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Selection Example Workpiece mounting condition: Operating conditions 90 Work load: 60 [kg] Speed: 300 [mm/s] Acceleration/Deceleration: 3000 [mm/s2] Stroke: 300 [mm] Mounting orientation: Horizontal Motor type: Incremental encoder External force: 10 [N] Lead 10: LEJS63B 80 Area where the regeneration option is required. 70 W 60 Work load [kg] Lead 20: LEJS63A 50 Lead 30: LEJS63H 100

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Smooth Cylinder

32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are