MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 30120 120 124 54 64 78 44 50 63 10.5 200 200 200 25 24 44 44

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 30120 120 124 54 64 78 44 50 63 10.5 200 200 200 25 24 44 44

MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

EX120/121/122

indicator LED INPUT UNIT 1 0 NPN 3 2 PWR 5 4 7 6 0 1 3 2 120 PNP 4 5 6 7 Input equipment connection connector (M12, 5 pins, plug) 61.5 4 54 EX 69.6 End Case Assembly EX240-EA2 EX240-EA4 120 120 22.1 98.8 5.6 2 x M5 (for mounting hole) 61.5 61.5 14 14 28.6 EX240-EA3 120 61.5 14 23.5 1663 Integrated Type/ For Input/Output Series EX250 u VQC1000/2000/4000 S0700 SV1000/2000/3000 e r q w y t

100

Weight [g] Model ZL3 ZL6 Basic type 390 470 Port exhaust +80 +25 Vacuum pressure switch (Excluding lead wire) +20 +20 Vacuum pressure switch (Including lead wire) +60 +60 With supply valve and release valve +120 +120 With supply valve and without release valve +80 +80 With pressure gauge +30 +30 With adapter assembly for bottom mounting +60 21 Multistage Ejector ZL3/ZL6 Series Internal Circuits

CG1

120 120 126 145 145 151 140.5 165.5 190.5 215.5 142.5 160 167.5 185 192.5 210 217.5 235 1-7-24 Standard: Single Acting Spring Return/Extend Series CG1 With Mounting Bracket Front flange/CG1FN (mm) Bore size (mm) Stroke range (mm) B E F FX FD FT 20 25 32 40 Up to 125 6 5.5 28 2 12 40 Up to 200 7 5.5 32 2 14 44 Up to 200 7 6.6 38 2 18 53 Up to 200 8 6.6 46 2 25 61 End boss is machined on

Integrated Controller

(= E) F 10 3 H9 (+0.025 0 ) depth 3 120 n x 4.5 48 4 3 H9 (+0.025 0 ) depth 3 5 8 3 H9 (+0.025 0 ) depth 3 H G 1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t a ti o n r a n g e e R g Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t a ti o n r a n g e e R g Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Manifold Series SY3000/5000/7000 Weight Tables Series SY7000 Series SY3000 Weight g Port size Weight g Port size L type, M type plug connector Valve model Type of actuation Grommet type L type, M type plug connector A, B Valve model Type of actuation DIN terminal Grommet type A, B Single 43 47 2 position Double Single 58 65 97 101 124 2 position SY360--M5 M5 x 0.8 Closed center Double 113 120

Single Axis Electric Actuator Series LJ1H

Transfer load m (kg) 600 a = 2000 a = 1000 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 40 Standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth

ZP

70 30 130 80 50 175 100 75 50 40 47.5 B5 06 08 N6 U6 A14 4 M14 x 1 19 4 12 M8 x 1.25 10 114 64 51.5 50 20 124 74 30 134 84 50 179 104 75 50 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction q Pad dia.

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

Membrane Air Dryer

Outlet air flow rate 150 L/min [ANR] [Series IDG175 L/min [ANR] Confirmation of compressed Step 1 air supply capacity Inlet Air Temperature Correction Factor for Outlet Air Flow Rate Review operating conditions.

17

Standard Strokes Bore size (mm) Standard stroke (mm) 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 12, 16 20, 25 32 to 100 Manufacture of Intermediate Strokes Spacer installation Spacers are installed in the standard stroke cylinder. 12 to 32: Available by the 1

Table of Contents

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Rotary Actuator

The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

Valve Single Unit

A: Orange B: Green M3 Terminal screw DIN rail (mm) 3 4 5 6 7 8 stations 2 stations 135.5 125 108 13.5 Stations n L1 L2 L3 L4 148 137.5 118.5 14.5 160.5 150 129 15.5 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171 13.5 (Rail mounting hole pitch 12.5) 1-6-100 SX3000: 18 Pins Terminal Block/Plug-in SS5X3-45T1UStations D(18 pins) C4 C6 Note) The L1 to L4 dimensions