ITV

ITVX 20 Output pressure (kPa) 0.5 0.5 Return PVQ 40 0 0 Out VEF VEP 60 0.5 0.5 VER VEA 80 1 0 25 50 75 100 1.0 0 25 50 75 100 0 2 4 6 8 10 VY1 Input signal (% F.S.) Count Input signal (% F.S.)

Square Tube Type Air Cylinder Series MB1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

Low Friction Cylinders Series MQ

2 20 20 16 10 16 1 10 10 100 75 60 30 100 75 60 30 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral load at the rod end is for the rod end female thread.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

CG1

acting/Spring extend (mm) C95 A B A B Bore size Auto switch model Bore size Auto switch model Hs Hs C92 25 50 75 100 125 150 200 25 50 75 100 125 150 200 All strokes All strokes 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5

Electric Actuator

12500 12500 10 10 7500 7500 Duty ratio: 75% Duty ratio: 75% 5000 5000 2500 2500 0 0 0 5 10 15 20 Work load [kg] 0 5 10 15 20 Work load [kg] LEFS25S;A LEFS25/Ball Screw Drive: Vertical LEFS25S;B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 17500 17500 Duty ratio: 50% 15000 15000 12500 12500 10 10 7500 7500 Duty ratio: 75% 5000 5000 Duty ratio:

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 20 115 120 125 130 D-Y7BAL 115 + 45 (n4) 2 120 + 45 (n4) 2 125 + 45 (n4) 2 130 + 45 (n4) 2 20 + 45 (n2) 2 n pcs.

Free Mount Cylinder

14 16 20 24 22 24 32 40 50 62 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 SA Y P Q QA R W T S 38 36 30 36 40 42 Z 75 79 79.5 93 105 121 S 38 36 40 46 50 52 Z 75 79 89.5 103

ZP

ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121

58

212 112 255 15 15 M14 x 1.5 56 Up to 1200 53 177 180 144 38 78.5 42 19 20 236 118 275 18 15 M16 x 1.5 (mm) Bore size (mm) Without rod boot With rod boot W K KA N P S MM l H 110 ZZ 222 e 75 f 40 h 133 ZZ1 245 125 140 160 1/ 5 stroke 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 110 228 75 40 133 251 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 120 246 75 40 141 267 20 34 34.5 M36 x 1.5 3/4 106

Clamp Cylinder Series CK1

Auto Switch l1 50 Safety distance (mm) 40 Operational range 30 l1 20 l1 Dangerous range 10 0 5000 10 15000 20 Welding current (A) l2 50 40 Safety distance (mm) 30 l2 l2 Operational range 20 10 0 5000 10 15000 20 Welding current (A) 1340

CLS

50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 32 36 40 50 50 63 64 72 80 100 100 126 +0.084 0 +0.084 0 3 5 30 46 28 0 0.2 161 78 18 110 146 128 16 114 64 110 M14 x 1.5 75 Up to 1000 +0.3

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

x 1.5 30 22 1/4 37 17 45 50 25 9 73 53 20 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 43 19 50 63 28 8 80 60 22.4 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 47 21 55 80 32 8 100 75 28 32 13 12 130 75 155 22 20 15 M12 x 1.75 26 26 29 M22 x 1.5 35 30 1/2 57 26 65 100 38 6.5 118 90 35.5 35 13 16 145 90 172 27 19 16 M12 x 1.75 27 26 34 M27 x 2

7

20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

•

(mm) 42 18 M1 6x 1.5 15 20 ,Bore size LT LX LV MM N P S (mm) X I V Without rOO boot" With rod bOot H ZZ f h t ZZl 133 l,t. stroke 296 45 I 20 110 273 75 40 125 8 1{)() 156.5 M30 x 1.5 305 1/2 98 45 1 30 110 283 75 40 140 9 112 178.5 M30 x 1.5 30,S 1/2 98 133 I ; stroke 306 so l 25 120 301 75 40 160 9 118 194.5 M36 x 1.5 345 3/4 106 141 I, ,,"slroke 322 ..

VQZ1000/2000/3000

Without light AXT100-20-1 With Indicator Light DIN Rail Removal/Mounting Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24V 12V 100V 200V 110V 220V Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with indicator light Removing 1. Loosen the clamp screw on the (A) side of both ends of the manifold. 2.

Table of Contents

220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow rate value [