Stability of suction position,

60.2 55.2 95.3 ZP3E-80BMl-P 91.3 86.3 126 406 Pad Unit ZP3E Series Pad diameter 100, 125 Pad form Bellows type with groove Dimensions: Pad Unit ZP3E-100BMlZP3E-125BMl71 80 88 58 65 73 (Plate) 16.3 (Plate) 16.3 25 8 3 22 3 8 60 50.5 106 100 71.5 24 133 125 90.3 24 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-100BMl 125 114 197 ZP3E-100BMl-P 186 175

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 30 155 145 135 130 125 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A59W 30 + 55 125 + 55 130 + 55 135 + 55 145 + 55 155 + 55 "n" pcs.

VQ7-6/7-8

to 10) Bottom port drawing 125.5 137.5 SMC (ports A, B) 37 93 255 (port X) 12 5 3 Y 25 22 14 14 1 2-Rc3/8 Ports R1, R2 2-Rc1/4, 3/8 Ports A, B Rc1/4, 3/8 Port P 9 25 25 Rc1/8 Port X (PE ) Rc1/8 Port Y (PE) 2 position/Double : VQ7-6-FG-D Double (reverse pressure): VQ7-6-YZ-D 3 position/Closed center : VQ7-6-FHG-D Exhaust center : VQ7-6-FJG-D Pressure center : VQ7-6-FIG-D 50 50 68.5 76.5 145

MY1

G Cushion needle GB 2-P (Hexagon socket head taper plug) A N Z + Stroke PE 4-LD through 8-MM depth M PA PF (18) 800.05 QW PB Floating bracket positioning pin hole (2-10H7 depth 10) Q + Stroke NN NE NG NC YY G GB N Z + Stroke For MY1B80, 100 NN 35 45 YY 28 35 K 25 28 A 200 230 345 400 PG 8 10 15 20 KK 17 24 B 14 17 L 200 230 340 400 C 8.5 10.5 LD 9 11 14 18 E 3 3 LL 100 115 175

•

71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?

SX

A: Orange B: Green (Rail mounting hole pitch 12.5) (Station n) (Station 1) Block separation lever Light/Surge voltage suppressor (Push type) (DIN rail dimension) (mm) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 235.5 223 210.5 198 185.5 185.5 173 160.5 148 225 212.5 200 187.5 175 175 162.5 150 137.5 165 154.5 144 133.5 123 112.5 102 91.5 81 SS5X3-45SStations BC4 C6 16 15

AS

57.1 52.4 3/8" 24 R 1/2 28.6 12.4 1.2 55.8 62.9 AS431F-04-12SD AS431F-N04-11SD 12 3/8" 17.9 25.8 21 16.2 49.4 32.6 26.8 36.3 19.4 22 20.9 52 145 147 60.8 57.1 1.2 1/2" NPT 1/2 23.8 21.7 29 26.8 55.8 12.4 62.9 AS431F-N04-13SD 19.4 52 36.3 22 147 60.8 Reference dimensions of M5 x 0.8, R threads after installation.

58

(Different surfaces, Same surface), With 1 pc. 145 35 155 D-F5NTL 35 + 55(n 2) 2 (n = 4, 8, 12, 16) 145 + 55(n 4) 2 155 + 55(n 4) 2 With n pcs. (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) Different surfaces Same surface With 2 pcs. With n pcs. With 2 pcs.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT TF3040C-TX TF3060C-TX [Unit: mm] 3-M6 8-M M4 M4 3-M6 M6 Approx.17 22 22 G 2 F 1 E 2 IN D 1 D 1 D 1 L C 2 K 2 B 5 J A 5 H 5 Model Dimensions [mm] A B C D E F G H J K L M R3.25 length 8 TF3040C-TX 438 412 390 100 175 160 145 200 Approx.190 180 Approx.91.5 (M6) TF3060C-TX 12 35 12.

MGP

M L MGP 25, 50, 75, 100 16 MXS 20 25 32 40 50 63 MXQ MGP 25, 50, 75, 100, 125, 150, 175, 200 M L MXF MXW 80 100 M L MGP 50, 75, 100, 125, 150, 175, 200 MXP OUT(N) IN(N) Theoretical Force MG (N) Rod dia.

HRX-OM-I051

to 0.7 (45 to 100 [PSIG]) Required flow of facility water*9 (50Hz/60Hz) L/min 3/4 5/6 9/10 13/14 (0.8/1.1[gal/min]) (1.3/1.6[gal/min]) (2.4/2.6[gal/min]) (3.4/3.7[gal/min]) Facility water port Rc 1/2 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 20 30 Dimensions*7 mm W380D870H860 W380D870H950 (W14.96xD34.25xH33.86 [inch]) (W14.96xD34.25xH37.40 [inch]) Weight*8 kg 145

3

Therefore, it is important to secure as a danger zone a cylindrical area with the length of the clamp arm as its radius, and the stroke plus 20 mm as its height. 123 135 155 203 363 518 65 56 Head flange (including mounting bolt) 130 150 175 209 371 578 69 58 Calculation: (Example) MKG20-10RNZ Standard calculation: MKB20-10RZ Extra weight calculation: Head flange With arm ...222 g .130

VFS

Rc , 1 4 3 8 2 position double: VFS3210-E, VFS3210-D 3 position closed center: VFS3310-E, VFS3310-D 3 position exhaust center: VFS3410-E, VFS3410-D 3 position pressure center: VFS3510-E, VFS3510-D 3 position double check: VFS3610-E, VFS3610-D 2-5.6 mounting hole 2-5.6 mounting hole Applicable heavy-duty cord O.D. 8 to 10Pilot valve manual override Light window at DZ, EZ 165 (3 position: 175

One-touch Fittings

P.141 P.145 Male elbow P.140 KQ2L Triple universal male elbow KQ2VT Plug-in elbow KQ2L Use to three-branch a female thread at right angles. Three individual parts rotate 360. Use to pipe a female thread at right angles. Most general model.

Refrigerated Thermo-chiller

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

2-Color Display Digital Flow Switch Series PFM

g LCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, Au, Stainless steel 304 Straight Without orifice: 125 g Bottom Without orifice: 135 g Straight With orifice: 165 g Bottom With orifice: 175 g Straight Without orifice: 55 g Bottom Without orifice: 65 g Straight With orifice: 95 g Bottom With orifice: 105 g Mass Wetted parts material Analog

Electric Actuator

175 230 Horizontal Standby power consumption when operating [W] Note 7) 2 2 2 Vertical 8 8 18 Max. instantaneous power consumption [W] Note 8) 445 725 1275 Type Note 9) Non-magnetizing lock Lock unit specifications Holding force [N] 131 255 197 385 330 660 Power consumption at 20oC [W] Note 10) 6.3 7.9 7.9 24 VDC 0 10% Rated voltage [V] Note 1) Consult with SMC for non-standard strokes as

Low Profile Slide Table Series MXF

Since there are other applicable auto switches than listed, refer to page 145 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

Environment

175 175 Standby power consumption when operating [W] Note 12) Horizontal 2 2 2 Vertical 8 8 8 11LEFS 11LEJS Max. instantaneous power consumption [W] Note 13) 445 724 724 Type Note 14) Non-magnetizing lock Holding force [N] 131 255 485 157 308 588 197 385 736 Power consumption [W] at 20C Note 15) 6.3 7.9 7.9 Rated voltage [V] 24 VDC 0 -10% 25ALock unit specifications LEC Note 1) Please consult

CP95

12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150