NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3540 Wry NVZ3140-OM-017 NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 13-/22-MXS20

SMC

8 15 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I Operating port 2-Rc, G, NPT1/8 13 3 2M6 x 1 thread depth 6.5 5H9 depth 5 +0.030 0 5H9 depth 5 +0.030 0 HA GA NN-M6 x 1 thread depth 12 6 B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

JMGP 20 to 32 1 to 199 Applicable stroke (mm) 40 to 63 5 to 195 MGP Partno.:MGPWM20-49 Aspacer1mminwidthisinstalledinaMGPWM20-50. Cdimension(Bodylength):84mm Example MGPW MGPW MGQ Theoretical Output OUT IN MGG Made to Order: Individual Specifications (For details, refer to page 517.)

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

X51 Long adjustment nut specification For clean room specifications, refer to Pneumatic Clean Series catalog. 195

Table of Contents

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

MG

220 320 85 121 171 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) Over 200 st Over 50 st to 200 st Over 50 st to 200 st Over 200 st Over 25 st to 50 st Over 25 st to 50 st Over 200 st Over 50 st to 200 st Over 50 st to 200 st 50 st or less 50 st or less Over 200 st 25 st or less 25 st or less 80 100 115

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

Integrated Controller

L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20

17

st 100 st or less Over 100 st 200 st or less 82.5 92.5 77.5 77.5 Over 200 st 0 0 0 0 50 st or less Over 50 st 100 st or less Over 100 st 200 st or less Over 200 st 30 st or less Over 30 st 100 st or less Over 100 st 200 st or less Over 30 st or less 55 65 76 81.5 Over 30 st 100 st or less Over 100 st 200 st or less 84.5 94.5 100 100.5 Over 200 st 1 3 6 12 200 st 12 16 20 25 12 16 20 25 42

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 ** Non-Standard Product, consult factory for lead time.

Refrigerated Air Dryers

VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current [A] Refrigerant R407C (HFC) IDF F 50/60 Hz *6 Three-phase 200

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

Thermo-chiller/Rack Mount Type

(Pending for UL Standards) 1000/1100 200/200 Watercooled refrigeration Anti-quake bracket4 Single-phase 100 VAC (50/60 Hz)/ 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800

JXCx-OMT0023

The upper limit for the actual time of the arc part is as follows: At acceleration: 20 STA , At deceleration: 20 STB (Example) Settings of STA = 20, STB = 5000 and STC = 200 limit the actual arc part times as follows: 20 20 Since =100[ms]<200[ms], At acceleration: 100 [ms] the time is limited to 100[ms]. 20 5000 Since =400[ms]>200[ms], At deceleration: 200 [ms] the time is as-is.

IDU/IDF

/200 to 220VAC (50/60Hz) Single phase, 220, 240/220 to 240VAC (50Hz) 184 213 Power source 283 330 280 328 292 10 (for 100VAC), 5 (for 200VAC) Air cooled R134a Rc 3/8 Drain tube 10 attached Rc 1/2 Rc 3/4 Rc 1/4 INA-20-41-04 Note 5) AD53 15 187 210 207 250 202 245 247 257 210 260 195 240 172 179 283 330 280 328 259 50Hz 60Hz 50Hz 60Hz 50Hz 50Hz 50Hz 100 VAC Power consumption (W) 200

CG1

7 5.5 32 2 14 44 Up to 200 7 6.6 38 2 18 53 Up to 200 8 6.6 46 2 25 61 End boss is machined on the flange for E.