IZx-OMT0049

) Note 40) Note 40) Note 40) ION BALANCE OFF ON Display Ions are generated (green) Note 40) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 45) Note 44) Note 42) Note 43) Note 44) Note 44) OFF ON Product type IZTP41(green) IZTP42(blue) DAC/AC OFF ON Maintenance (green) NDL Note 47) Note 47) Note 47) Note 47) OFF ON Built-in sensor (green) SNSR Note 48) Note 48) Note 48

CE

Bore size (mm) Applicable switch Note 175 200 250 300 400 500 150 125 100 75 25 50 12 Switch mounting screw (M3 x 0.5 x 8l) Square nut D-A7, A8 D-A7H, A80H D-A73C, A80C D-A79W D-F7V D-F7, J7 D-J79C D-F7WV D-F79W, J79W 12 20 BQ-1 20 32 32 40 50 63 40 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 50 BQ-2 63 Contact SMC regarding non-standard strokes.

Cylinder with Turntable Series MGT

MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100

IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15 4 4 5 9 11.5

Series CE1

2 NBR Cushion seal Cushion ring A 40 to 63 #2 Rolled steel !3 NBR Piston gasket Cushion ring B 40 to 63 #3 Rolled steel !4 NBR Port seal Cushion valve #4 40 to 63 !5 NBR Joint seal #5 Piston nut 40 to 63 Rolled steel !6 NBR Valve seal #6 Port joint 40 to 63 Stainless steel !

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

In the case of MVGQM50-40 st, an interface of 10 mm wide is installed inside of the MVGQ50-50 st, and thus the full length dimension of the body is the same as 50 st. 20, 30, 40, 50, 75, 100 125, 150, 175, 200 25 M L MVGQ 25, 50, 75, 100, 125, 150, 175, 200 M L 32, 40 MVGQ 50, 63 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

VZ3000

-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 Series VZ3000/Base Mounted Manifold Specifications Manifold Standard Manifold Specifications Type 40 Type 41 Type 42 Type 43 Model Manifold

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

VZ5000

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

CS1 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80

Air Slide Table Series MXJ

Lr=40 mm MXJ4 MXJ4 MXJ4 0.03 0.20 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXJ4-10 MXJ4-10 MXJ4-5 MXJ4-5 MXJ4-5 MXJ4-5 -10 0.08 -10 0.15 MXJ4-10 MXJ4-10 0.02 0.06 MXJ4-5 MXJ4-5 0.10 0.04 0.01 0.05 0.02 20 40 60 0 10 30 50 20 40 60 0 10 30 50 0 10 5 15 Load (N) Load (N) Load (N) MXJ6 MXJ6 MXJ6 0.04 0.10 0.20 Table displacement amount

IZx-OMP0064

Distance from the ionizer to the neutralized workpiece (mm) IZS40/41 IZS42 With air purge With air purge Ion generation frequency (Hz) Without air purge Without air purge High speed static neutralization cartridge 0.1 100 to 175 50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000

Manifold Specifications

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

NCG/CG1

40 50 58 58 71 71 6 7 7 8 9 9 11 14 5.5 5.5 6.6 6.6 9 11 11 14 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 40 44 53 61 76 92 104 128 20 25 32 40 50 63 80 100 28 32 38 46 58 70 82 100 Note) ( ): Denotes the dimensions for long stroke.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

d9 20 25 32 40 42 16 28 43.4 143 164 168 189 193 214 42 20 28 48 150 171 175 196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 6-5-12.

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series