3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Dual Rod Cylinder Series CXSJ/CXS

CXSL 1 1 0.5 Mass m (kg) 32 Mass m (kg) 32 25 0.1 0.1 25 20 0.05 20 15 15 10 0 0.01 0 0.01 10 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Mass m (kg) Mass m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

NPT 80 mm G 100 mm Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Rotary Cylinder Series MRQ

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Rotating angle Linear motion stroke (mm) 5 10 15 20 25 30 40 50 75 100 80 to 100 32 1.02 Nm 170 to 190 80 to 100 40 1.91 Nm 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

Compact

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

Air Slide Table Series MXQ

100 20 40 60 80 100 160 40 80 120 Load (N) Load (N) Load (N) 96 Air Slide Table Series MXQ The graphs below show the table displacement when the static moment load is applied to the table.

Air Slide Table

-75 MXQR12-50 MXQR12-40 MXQR12-30 MXQR12-20 MXQR12-10 0.10 MXQR12-100 0.020 MXQR12-100 0.04 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR12-30 0.08 MXQR12-50 0.016 MXQR12-50 0.03 MXQR12-75 MXQR12-40 0.06 MXQR12-75 MXQR12-30 0.012 MXQR12-40 MXQR12-20 0.02 0.04 0.008 MXQR12-20 MXQR12-10 0.01 MXQR12-10 0.02 0.004 0 0 0 20 40 60 80 100 20 40 60 80 100 160 40 80

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard) 1: Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) 12 12

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

180° Angular Style Air Gripper Series MHY2/MHW2

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 100 30 0.4 0.4 80 0.3 0.3 0.2 20 60 MHZ 0.2 40 10 20 MHF 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm) MHL MHR Confirmation

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard) 1: Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) Courtesy

Low Profile Slide Table Series MXF

F A A MXH Lr MXF16 MXU Lr = 40 mm 0.07 0.07 0.20 MXS Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 0.06 MXF16-75 MXQ 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MXF 0.12 0.04 0.04 MXF16-50 MXW MXF16-50 0.03 0.03 0.08 MXF16-30 0.02 0.02 MXJ MXF16-30 0.04 0.01 0.01 MXP 0 0 20 40 60 80 100 20 40 60 80 100 120 60 0 40 80 100 20 MXY Load

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5 Hole Size for

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5 Hole Size for

RZQ

J C A B DFull stroke -X 20Data eEntire stroke extension by pressurizing A, B and C ports. 10-10-1 2 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9N Mounting style Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Rotary Angle Theoretical Output Operating pressure (MPa) Unit: N During unclamping (Extension end) 80 to 100 (9010) L type During unclamping (Extension end) Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2 2 3 3.7 4.9 6 8 10.5 12.5 16.5 19.6 28 31.2 80 to 100 (9010) R type 0.3 24 33 45 60 60.8 90.2 112 149 182 243 319 380 502 596 851 948 0.5 40 55 75 100 100

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.