Precautions 1

size (mm) 20 25 32 40 0 0.033 65.3 8 5 41 75 60 4 7 13 8 30 26 13 34 15.5 18 Up to 300 20 0 0.033 70.5 8 6 45 75 60 4 7 13 10 37 32 17 40 19.5 22 Up to 300 26 0 0.033 76.5 8 6 45 75 60 4 7 13 12 37 32 17 40 19.5 22 Up to 300 26 0 0.039 84.5 10 8 50 82 36 66 5 7 16 14 47.3 41 22 52 21 24 Up to 300 32 (mm) ZZ Z S QY Q NN NA N I MM K Bore size (mm) 20 25 32 40 116 107 62 14 19.8 M20 x 1.5

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

136.5 10 210.5 200 174.5 21 147 11 223 212.5 185 22 157.5 12 235.5 225 195.5 23 168 13 235.5 225 206 18 178.9 14 248 237.5 216.5 19 189 15 260.5 250 227 20 199.5 16 273 262.5 237.5 21 210 17 285.5 275 248 22 220.5 18 298 287.5 258.5 23 231 19 310.5 300 269 24 241.5 20 310.5 300 279.5 18.5 252 L1 L2 L3 L4 L5 246 D-sub Connector 10-SV Dimensions: Series 10-SV2000 for D-sub Connector U D B

5 Port Solenoid Valve SY Series

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

5 Port Solenoid Valve

mmm J kit: PC wiring compatible flat ribbon cable 325 20 Max. 16 stations T kit:Terminal block box 660 20 Max. 20 stations 455 Note 4) L kit: Lead wire 20 Max. 24 stations M kit: Circular connector 390 20 Max. 24 stations M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") C kit: Connector 115 20 Max. 20 stations SS0755-mCmC (Manifold pitch: 8.5) Rc1/8 S kit: Serial transmission (EX510)

VZ5000

hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN

MB

20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A5 D-A6 (n2) 2 (n2) 2 (n2) 2 20 + 55 n = 2, 4, 6, 8 15 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 MB n (Same side) 2 (Different sides or Same side) 20 25 25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 +

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

NCQ2/CQ2

Rod Axial Piping End Lock Clean Series Copper/Fluorine free series Construction and Parts 0.5 MPa 0.4 MPa With Auto Switch With Rubber Bumper 200 300 100 100 Allowable lateral load at rod end W (N) 100 50 40 30 50 80 100 Load mass (kg) 80 63 20 63 10 50 10 50 40 5 40 32 5 4 3 32 25 25 20 1 2 20 0.5 1 0 10 20 30 40 50 60 70 80 90 100 100 200 500 300 50 Maximum speed (mm/s) Cylinder stroke

Compact Cylinder

10 50: 10, 20 38 Large Bore Size Single rod CQ2 10 to 300 57 NEW Double acting Double rod CQ2W 10 to 300 63 Long Stroke Single rod CQ2 Double acting 125 to 300 69 NEW 12, 16: 5 to 30 20, 25: 5 to 50 32, 40: 5 to 100 50, 63: 10 to 100 Non-rotating Rod Single rod CQ2K 78 NEW Double acting 12, 16: 5 to 30 20, 25: 5 to 50 32, 40: 5 to 100 50, 63: 10 to 100 Double rod CQ2KW 92 12, 16: 5 to 30

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

72.5 54.5 M type plug connector (M) (Lead wire length) 89 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 56 300 77 R 3 1 P Equation L1=16n+11 L2=16n+22 n: Stations (Max. 20 stations) Dimenisons L n 2 43 54 75 85.5 14 235 246 275 285.5 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 20 331 342 362.5 373 7 123 134 162.5

0.4

Single solenoid Lead wire length Double solenoid AXT661-12AL 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-12AL 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-14AL AXT661-14AL-6 AXT661-14AL-10 AXT661-14AL-20 AXT661-14AL-30 AXT661-13AL AXT661-13AL-6 AXT661-13AL-10 AXT661-13AL-20 AXT661-13AL-30 AXT661-14ANL AXT661-14ANL-6 AXT661-14ANL-10 AXT661-14ANL-20 AXT661-14ANL-30 AXT661-13ANL AXT661-13ANL

10

1 IN 1056 211 317 422 528 634 739 845 950 1056 50 100 200 300 400 500 1000 50 20 OUT 1963 393 589 785 982 1178 1374 1570 1767 1963 IN 1649 330 495 660 825 989 1154 1319 1484 1649 Maximum speed [mm/s] 63 20 OUT 3117 623 935 1247 1559 1870 2182 2494 2805 3117 Example) Load limit at rod end when the air cylinder 63 is actuated at 500 mm/s.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Position for light mounting) Socket Terminal block Shaved part Terminal thread (3 positon) Hook Part No. of DIN Connector (Based on DIN) Without light AXT100-20-1 With light Rated voltage Voltage symbol Part No. 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with light

LG1H

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

HRX-OM-Q026

-, HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17

MNB

1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa

MNB

200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example

100

(Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series

Smooth Cylinder/Low Speed Cylinder

63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth