17

22 (10) 22 (10) 25 25 25 20 25 11 (5) 11 (5) 25 20 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12 12 2.2 (1) 2.2 (1) 12 12 12 1.1 (0.5) 10 20 30 31 50 100 101 200 300 1.1 (0.5) 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 110 (50) 110 (50) Load mass m lbs (kg) Load mass m lbs (kg) 50,63 50,63

MLGP

20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (

MLGP

20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

63 20 46 24 132 60 231 226 10 182 50 115 74 48 17 18.5 Lube Non-lube Up to 1200 30 to 1200 M24 x 1.5 71 25 56 29 67 160 301 277 225 12 60 140 86 60 20 23 Up to 1200 30 to 1200 M30 x 1.5 80 30 65 33 200 76 326 330 15 270 70 140 96 60 20 23 Without rod boot With rod boot (Single side) (Both sides) Bore size (mm) Type MM P N S LX X LY Y l ZZ h f e H ZZ ZZ 125 140 160 180 200 250 300 1/2 341

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

CM2

M14 x 1.5 21.5 42.5 M32 x 2 171 1/4 20Data l Symbol Z h f e B3 Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 18.2 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 48 61 73 86 111 136

Single Axis Electric Actuator Series LJ1H

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

MLGP

63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load

MLGP

63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load

7.5

Symbol Stations 02 20 20 2 stations 20 stations Specify the valve stations not exceeding the maximum stations. SUP/EXH block fitting spec.

Compact 5-Port Solenoid Valve

142.4 151.4 160.4 169.4 178.4 187.4 196.4 205.4 214.4 223.4 232.4 241.4 250.4 259.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 273 285.5 285.5 298 310.5 310.5 323 335.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5 250 262.5 275 275 287.5 300 300 312.5 325 L5 20.5 22 24 19.5 21 23 18.5 20 22 23.5 19 21 22.5 18 20 21.5 23.5 19

Cylinder with Lock

f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109 74 M10 x 1.5 5 17 9.5 With Rod [mm] Model L Min. length Max. length 32 250 2500*1 40 250 50 300 63 300 80 300 100 300

LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance (mm) LJ1H20 LJ1H30 10 20 10 Lateral load 100% 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 200 Amount of deflection (m) Amount of deflection (m) 200 100 100 50 50 20 20 10 10 Lateral load 100% 5 Lateral load 50% 5 Horizontal empty weight deflection

4/5 Port Air Operated Valve Series SYJA3000

79 [83.4] 91.9 [96.3] 1 55 109.7 82 94.9 (Lead wire length) Approx. 300 59.6 [66.6] Approx. 300 (Lead wire length) 48.4 [55.4] 33.1 Refer to page 1-5-79 for dimensions with connector cable.

V

Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

Membrane Air Dryer

pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 30 IDG30A IDG20 IDG30HA 30 IDG20H 40 50 40 0 100 200 300 400 500 0 100 200 300 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) IDG50A, 50HA IDG60, 60H Outlet air atmospheric pressure dew point (oC) Outlet

51

64 74 16 20 22 30 36 46 28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

0.55

115 99 20 stations 853 837 Station n L1 L2 DIN terminal (D, Y) M-type plug connector (M) L-type plug connector (L) Conduit terminal (T) (Indicator light) 3R 3R 3R 3R 138.1 143.2 Max. 10 152.1 Approx. 300 (Lead wire length) 151.6 1P 1P 1P 1P Max. 10 154.5 Pg9 137 Approx. 300 (Lead wire length) 126 103.3 Pg9 166 157 170.2 [160.2] 160.2 [150.2] Applicable cable O.D. 4.5 to 7 Applicable cable

VZ3000

Center/Pressure Center VZ3320 Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length