VZS

(External pilot port) Not machined K plug connector: VZS2150-KZ-01 L plug connector: VZS2150-L(Z)-01 (Lead wire length) With light/ surge voltage suppressor 300 (Lead wire length) 300 Other dimensions are the same as the grommet type.

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Exhaust center VFS5410 VFS5400 55 or less 1.14 300 Pressure center VFS5510 VFS5500 55 or less 1.14 300 Double check VFS5610 60 or less 1.99 180 Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

300 400 300 9 10 19 40 4 40 55 20 8 21 7 4 60 75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114

Compressed Air Cleaning Filter Series

(12B) 550 D 570 150 E 300 270 F 520 823 G 1093 3 H 3 797 J 620 AMF801 AMF901 867 AMF800/900/1000 ORIENTATION OUT IN 3 x H holes OUT IN Label Drain (mm) Model Connection (Flange) 50(2B)JIS 10K FF flange 50(2B), 80(3B), 100(4B)JIS 10K FF flange 500 A 330 B 200(8B) C 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 560 745 400 550 300 300 1070 1090 1230 1320

Slide Unit Series CX2/CXWM/CXWL

For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.) Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Load voltage Auto switch part no.

Slide Unit Series CX2/CXWM/CXWL

For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.) Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Load voltage Auto switch part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

325 63 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 56 68 30 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 100 56 76 32 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500

Cylinder with Lock Series CLS

MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400

CLS

2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without

MRQ

Reed switch: D-A7/A8, Series MRQ Linear motion part size Solid state switch: D-F7/J7 Output of rotating part (at 0.5MPa) Linear motion stroke (mm) Rotation angle 5 10 15 20 25 30 40 50 75 100 80 to 100 170 to 190 32 1.02N/m An air cushion is also available. 80 to 100 170 to 190 40 1.91N/m Application examples A connecting port can be selected from two positions that are available on the rotation

Stability of suction position,

ZP3EB-Y1JB10 [Weight: 170 g] ZP3EB-Y1JB30 [Weight: 186 g] ZP3EB-Y1JB50 [Weight: 196 g] Part no.

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

CQS

With rubber bumper 0.043 0.075 0.11 0.18 Minimum Operating Pressure Unit: MPa Bore size (mm) Stroke range Stroke range Stroke range Bore size Bore size 31 to 100 35 to 100 12, 16 12, 16 Min. operating pressure (MPa) 12 16 20 25 31 to 200 55 to 200 20 20 0.07 0.07 0.05 0.05 31 to 300 55 to 300 25 25 Example Model no. : CQSB25-47D -XB10 Makes 47stroke tube. B dimension is 69.5mm.

Large Size Vacuum Module: Series ZR

Note 2) Output current (Rated pressure range) Linearity 1% F.S. or less Maximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green) Sampling cycle: 5 times/sec. 2% F.S. 1 digit (Ambient temperature of 25C) Lights up when switch output is turned ON.

Fieldbus System

Current consumption 100 mA or less Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 300 g Note 1) M12 (4-pin) connector can be connected. Note 2) When input signal exceeds 22 mA, the protection function activates and the input signal is interrupted.

New

S z 300 Q R S L L E E U U 1/4 Exhaust port 1/4 Exhaust port H H F F G G 2 x P Port size 2 x P Port size DIN terminal A B D C J K I Q Cable 6 to 12 S T R (44) U G1/2 L H E 1/4 Exhaust port F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 19 23.5 35 40 47 77 53.5 64.5 95 29.5 29.5 32 68.5 68.5 71 39 39 39 16.5 16.5 16.5 30 30 35 3/4 1

7ND9071en

Disconnect and remove all cabling which enters the limit switch housing (300). Remove screws (325), 3 pcs. and lift out the limit switch base plate (324) complete with switches, LUI and connector block. Open screw (326) and turn the limit switch housing (300) from the positioner housing. Remove the electronics cover (39). Proceed with the valve controller as applicable.

Air Slide Table Series MXQ

0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm